A conceptual design for a microelectronic ionization vacuum gauge

Applied Surface Science

Volumn 126, Issue 3-4, 1998, Pages 292-302

  Nicolaescu, Dan ^a,d   Filip, Valeriu ^b   Okuyama, Fumio ^c  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b UNIVERSITY OF BUCHAREST   (Romania)

^c NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^d NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

Author keywords

Conceptual design; Field emission; Microelectronic ionization

Indexed keywords

ELECTRIC FIELDS; ELECTRODES; ELECTRONS; IONIZATION; IONS; MAGNETIC FIELDS; MICROELECTRONICS; MOLECULES; SURFACES;

CYCLOID LIKE CLOSED TRAJECTORY; ELECTRON KINETIC ENERGY; FIELD EMISSION;

VACUUM GAGES;

EID: 0032473730     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00690-9     Document Type: Article

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