Vacuum microelectronic pressure sensor with novel "stepped" or "curved" cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 3, 1998, Pages 1226-1232

  Xia, S H ^a   Liu, J ^a,b  

^a INSTITUTE OF GEOLOGY AND GEOPHYSICS   (China)

^b TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001319764     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589989     Document Type: Article

References (12)

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