The improvement of the ionization on micro mass spectrometer using carbon nanotube emitter

Transactions of the Korean Institute of Electrical Engineers

Volumn 58, Issue 5, 2009, Pages 1004-1009

  Hong, Nguyen Tuan ^a   Song, S H ^a   Han, Kyu Sung ^a   Lee, S I ^a   Yang, Sang Sik ^a  

^a NONE

Author keywords

Carbon nanotube; Electron emitter; Ion source; Micro mass spectrometer; Micromachining

Indexed keywords

CARBON NANOTUBE EMITTERS; CHEMICAL CHARACTERISTIC; COLD CATHODE EMITTERS; ELECTRON EMITTER; ELECTRON EMITTERS; GATE ELECTRODES; GLASS SUBSTRATES; HIGH SENSITIVITY; HOT-FILAMENT CHEMICAL VAPOR DEPOSITION; IN-SITU; LONG LIFE; MASS-TO-CHARGE RATIO; MICRO MASS SPECTROMETER; RAPID RESPONSE; SILICON SUBSTRATES; TIME OF FLIGHT;

CARBON NANOTUBES; COLD CATHODE TUBES; COMPOSITE MICROMECHANICS; GLASS; ION SOURCES; IONS; MASS SPECTROMETERS; MASS SPECTROMETRY; MICROMACHINING; PLASMA ETCHING; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

SUBSTRATES;

EID: 67649562624     PISSN: 19758359     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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