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Volumn 84, Issue 26, 2004, Pages 5443-5445
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Carbon nanotube electron source based ionization vacuum gauge
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Author keywords
[No Author keywords available]
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Indexed keywords
IONIZATION VACUUM GAGES;
MULTIWALL NANOTUBES (MWNT);
RESIDUAL GAS ANALYZERS (RGA);
THERMAL CHEMICAL VAPOR DEPOSITION;
CATALYSTS;
CHEMICAL VAPOR DEPOSITION;
COMPUTER SIMULATION;
CURRENT DENSITY;
ELECTRON EMISSION;
ELECTRON SOURCES;
HEAT RADIATION;
IONIZATION OF GASES;
NITROGEN;
OPTIMIZATION;
PARAMETER ESTIMATION;
PARTIAL PRESSURE;
SPUTTERING;
TRANSMISSION ELECTRON MICROSCOPY;
ULTRAHIGH VACUUM;
CARBON NANOTUBES;
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EID: 3242674418
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1767956 Document Type: Article |
Times cited : (75)
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References (21)
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