Bayard-Alpert vacuum gauge with microtips

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 3, 1996, Pages 2119-2125

  Baptist, R ^a   Bieth, C ^a   Py, C ^a  

^a CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001152632     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588883     Document Type: Article

References (14)

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5. C. Benvenuti, Phys. Scr. T22, 48 (1988).
6. C. Oshima and A. Ohtuka, Technical Digest of the Fourth International Vacuum Microelectronics Conference, Nagahama, Japan, 22-24 August 1991 (unpublished), pp. 202-203.
7. C. Oshima, T. Satoh, and A. Otuka, Vacuum 45, 595 (1993).
8. SIMION, version 4.0, D. A. Dahl and J. E. Delmore, Idaho National Engineering Laboratory (1988).
9. R. Meyer, in Ref. 6, pp. 6-9.
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13. P. Grossetête, LETI internal report (1992).
14. E. A. Meyer and R. G. Herb, J. Vac. Sci. Technol. 4, 63 (1967).