Single carbon nanotube Pirani gauge by local synthesis

TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems

Volumn , Issue , 2007, Pages 1015-1018

  Kawano, T ^a   Suter, M ^a   Cho, C Y ^a   Chiamori, H ^a   Lin, L ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

And IC compatible synthesis; Carbon nanotube; Pirani effect; Pressure sensor

Indexed keywords

ACTUATORS; ATMOSPHERIC PRESSURE; ATMOSPHERICS; CARBON NANOTUBES; ELECTRIC CONNECTORS; GAGES; MICROSYSTEMS; MULTIWALLED CARBON NANOTUBES (MWCN); NANOCOMPOSITES; NANOPORES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; NITROGEN; NONMETALS; PROCESS ENGINEERING; SENSORS; TRANSDUCERS; VACUUM GAGES;

ABSOLUTE PRESSURES; AND IC-COMPATIBLE SYNTHESIS; CARBON NANOTUBE; CONTROLLED GROWTH; ELECTRICAL CONNECTIONS; I-V CURVES; INTERNATIONAL CONFERENCES; LOCAL SYNTHESIS; LOCALIZED SYNTHESIS; MULTI-WALLED CARBON NANOTUBE; NITROGEN ENVIRONMENT; PIRANI EFFECT; PIRANI GAUGE; PRESSURE SENSITIVITIES; PRESSURE SENSOR; SOLID-STATE SENSORS; VACUUM PRESSURE;

NANOTECHNOLOGY;

EID: 50049122393     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2007.4300305     Document Type: Conference Paper

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