Bayard-Alpert ionizatipn gauge using carbon-nanotube cold cathode

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 2, 2007, Pages 651-654

  Huang, J X ^b   Chen, Jun ^a   Deng, Z ^b   Xu, N S ^b  

^a SUN YAT SEN UNIVERSITY   (China)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CATHODES; CHEMICAL VAPOR DEPOSITION; SEMICONDUCTOR GROWTH; SENSITIVITY ANALYSIS; STAINLESS STEEL;

BAYARD-ALPERT (BA) IONIZATION GAUGE; COLD CATHODE; ION CURRENT; PRESSURE RANGES;

IONIZATION;

EID: 34047093385     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2433963     Document Type: Article

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