Modeling of a miniaturized mass spectrometer with field emission electron source

Applied Surface Science

Volumn 146, Issue 1, 1999, Pages 217-223

  Nicolaescu, Dan ^a   Filip, Valeriu ^b   Itoh, Junji ^a   Okuyama, Fumio ^b  

^a ELECTROTECHNICAL LABORATORY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELD EFFECTS; ELECTRON EMISSION; ELECTRON SOURCES; FIELD EMISSION CATHODES; IONS; MAGNETIC FIELD EFFECTS; MATHEMATICAL MODELS; MICROELECTRONICS; SENSITIVITY ANALYSIS;

VACUUM MICROELECTRONICS;

MASS SPECTROMETERS;

EID: 0032626941     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00053-7     Document Type: Article

References (21)

1. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993).
2. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 12 (2) (1994).
3. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 13 (2) (1995).
4. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 14 (3) (1996).
5. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 15 (2) (1997).
6. Proc. Internat. Vac. Microelec. Conf., selected articles published in J. Vac. Sci. Technol. B 16 (2) (1998).
7. Baptist R. Vide Sci. Tech. Appl. (France). 52(282):1996;499.
8. Spindt C.A. Surf. Sci. 266:1992;145.
9. Ogiwara N., Shiho M., Ueda Y. Vacuum. 44:1993;661.
10. Ogiwara N., Miyo Y., Ueda Y. Vacuum. 47:1996;575.
11. A. Otuka, M. Yoshino, C. Oshima, Technical Digest of IVMC 91, Nagahama, Japan, 1991, p. 202.
12. C. Sun, MS Thesis, New Jersey Institute of Technology, Newark, NJ, USA, 1993, unpublished.
13. Oshima C., Satoh H., Otuka A. Vacuum. 44:1993;595.
14. Baptist R., Bieth C., Py C. J. Vac. Sci. Technol. B. 14:1996;2119.
15. Baptist R., Bachelet F. Vacuum. 48:1997;947.
16. Nicolaescu D., Filip V., Okuyama F. Appl. Surf. Sci. 126(3-4):1998;292. Part II.
17. Nicolaescu D., Filip V., Okuyama F. Ultramicroscopy. 73:1998;129.
18. S. Kanemaru, J. Itoh, H. Ochiai, 7th IVMC, 1994, p. 213.
19. Spindt C.A., Holland C.E., Rosengreen A., Brodie I. J. Vac. Sci. Technol. B. 11:1993;468.
20. Nicolaescu D., Filip V. Appl. Surf. Sci. 94-95:1996;87.
21. E. Nasser, Wiley-Interscience, New York, 1971.