Fabrication of cold cathode ionization gauge using screen-printed carbon nanotube field electron emitter

Japanese Journal of Applied Physics

Volumn 47, Issue 4 PART 1, 2008, Pages 2032-2035

  Suto, Hirofumi ^a   Fujii, Shunjiro ^a   Yoshihara, Kumiko ^a   Ishida, Kazuhiro ^a   Tanaka, Yuya ^a   Honda, Shin Ichi ^a   Katayama, Mitsuhiro ^a  

^a OSAKA UNIVERSITY   (Japan)

Author keywords

Carbon nanotube; Field electron emission; Ionization gauge; Vacuum electronics

Indexed keywords

CARBON; ELECTRON SOURCES; ELECTRONS; ELEMENTARY PARTICLE SOURCES; FABRICATION; FIELD EMISSION CATHODES; GAGES; IONIZATION; NANOCOMPOSITES; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; NANOTUBES; SILICON; VACUUM; VACUUM TECHNOLOGY;

CNT FIELD EMITTERS; COLD CATHODES; ELECTRON EMITTERS; FIELD ELECTRON EMISSION; FIELD ELECTRON EMITTERS; FIELD EMITTERS; GOOD STABILITIES; HIGH QUALITIES; ION CURRENTS; IONIZATION GAUGE; IONIZATION GAUGES; SI SUBSTRATES; SOURCE MATERIALS; VACUUM ELECTRONIC DEVICES; VACUUM ELECTRONICS; VERTICALLY ALIGNED;

CARBON NANOTUBES;

EID: 54249158368     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.2032     Document Type: Article

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