Application of the time-of-flight technique to pressure measurements in XHV by a quadrupole mass spectrometer

Vacuum

Volumn 47, Issue 6-8, 1996, Pages 575-578

  Ogiwara, N ^a   Miyo, Y ^a   Ueda, Y ^b  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b ULVAC INC   (Japan)

Author keywords

ESD effect; Field emitter cathode; Quadrupole mass spectrometer; TOF; XHV

Indexed keywords

CARBON MONOXIDE; CATHODES; DEGASSING; ELECTRONS; HIGH PRESSURE ENGINEERING; HYDROGEN; IONS; MASS SPECTROMETERS; VACUUM;

EXTREMELY HIGH VACUUM; FIELD EMITTER CATHODE; PARTIAL PRESSURE MEASUREMENT; QUADRUPOLE MASS SPECTROMETER; SPINDT-TYPE FIELD EMITTER ARRAY; TIME OF FLIGHT;

PRESSURE MEASUREMENT;

EID: 0030173723     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/0042-207x(96)00023-1     Document Type: Article

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