On-chip electron-impact ion source using carbon nanotube field emitters

Applied Physics Letters

Volumn 90, Issue 12, 2007, Pages

  Bower, Christopher A ^a   Gilchrist, Kristin H ^a   Piascik, Jeffrey R ^a   Stoner, Brian R ^a   Natarajan, Srividya ^b   Parker, Charles B ^b   Wolter, Scott D ^b   Glass, Jeffrey T ^b  

^a RTI INTERNATIONAL   (United States)

^b USA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON NANOTUBES; CATHODES; ELECTRIC CURRENTS; ELECTRON SOURCES; IMPACT IONIZATION; MICROPROCESSOR CHIPS;

CONTROL GRID; FIELD EMISSION CURRENT; GAS PRESSURE; ION CURRENTS;

FIELD EMISSION;

EID: 33947584427     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2715457     Document Type: Article

References (17)

1. E. de Hoffman and V. Stroobant, Mass Spectrometry Principles and Applications (Wiley, London, 2002), pp. 11-13.
2. J. F. O'Hanlon, A User's Guide to Vacuum Technology (Wiley, New York, 1989), pp. 89-94, and 123.
3. E. R. Badman and G. R. Cooks, J. Mass Spectrom. 35, 659 (2000).
4. O. Kornienko, P. T. A. Reilly, W. B. Whitten, and J. M. Ramsey, Anal. Chem. 72, 559 (2000).
5. C. Dong and G. R. Myneni, Appl. Phys. Lett. 84, 5443 (2004).
6. I.-M. Choi and S.-Y. Woo, Appl. Phys. Lett. 87, 173104 (2005).
7. C. Dong and G. R. Myneni, J. Vac. Sci. Technol. A 17, 2026 (1999).
8. B. R. Chalamala, R. H. Reuss, and K. A. Dean, Appl. Phys. Lett. 79, 2648 (2001).
9. K. A. Dean and B. R. Chalamala, Appl. Phys. Lett. 75, 3017 (1999).
10. C. Bower, W. Zhu, D. Shalom, D. Lopez, L. H. Chen, P. L. Gammel, and S. Jin, Appl. Phys. Lett. 80, 3820 (2002).
11. C. Bower, D. Shalom, W. Zhu, D. Lopez, G. P. Kochanski, P. L. Gammel, and S. Jin, IEEE Trans. Electron Devices 49, 1478 (2002).
12. L. J. Kieffer and G. H. Dunn, Rev. Mod. Phys. 38, 1 (1966).
13. J. Carter, A. Cowen, B. Hardy, R. Mahadevan, M. Stonefield, and S. Wilcenski, The PolyMUMPS Design Handbook, MEMSCAP Inc., Durham, NC, 2005 (available at http://www.memscap.com/mumps/documents/PolyMUMPs.DR.v11.pdf).
14. H. Cui, O. Zhou, and B. R. Stoner, J. Appl. Phys. 88, 6072 (2000).
15. C. Bower, O. Zhou, W. Zhu, D. J. Werder, and S. Jin, Appl. Phys. Lett. 77, 2767 (2000).
16. G. J. Schulz and A. V. Phelps, Rev. Sci. Instrum. 28, 1051 (1957).
17. J.-M. Bonard, H. Kind, T. Stockli, and L.-O. Nilsson, Solid-State Electron. 45, 893 (2001).