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Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 40, Issue 4 A, 2001, Pages 2165-2172

Electron motion three-dimensional confinement for microelectronic vacuum gauges with field emitters

(4) Nicolaescu, Dan a,c Kanemaru, Seigo a Filip, Valeriu b Itoh, Junji a

a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST (Japan)

b UNIVERSITY OF BUCHAREST (Romania)

c Micromachine Center (Japan)

Author keywords

Field emission; Three dimensional confinement; Vacuum gauge; Vacuum microelectronics

Indexed keywords

ELECTRIC FIELD EFFECTS; FIELD EMISSION CATHODES; MAGNETIC FIELD EFFECTS; MICROELECTRONICS; VACUUM GAGES;

THREE DIMENTIONAL ELECTRON CONFINEMENT; VACUUM MICROELECTRONICS;

ELECTRON MOBILITY;

EID: 0035302222 PISSN: 00214922 EISSN: None Source Type: Journal
DOI: 10.1143/jjap.40.2165 Document Type: Article

Times cited : (3)

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