Separation of electron-stimulated-desorption neutrals from outgassing originating from the grid surface of emission-controlled gauges: Studies with a heated-grid gauge

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3467-3472

  Watanabe, Fumio ^a   Suemitsu, Maki ^b  

^a Sukegawa Electric Co Ltd   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033454972     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582084     Document Type: Article

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