Carbon nanotube vacuum gauges with wide dynamic range

IEEE Transactions on Nanotechnology

Volumn 8, Issue 2, 2009, Pages 252-257

  Kaul, Anupama B ^a   Manohara, Harish M ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Carbon nanotube (CNT) pressure sensors; Low power vacuum sensors; Microcavity pressure sensors; Suspended tubes

Indexed keywords

GAGES; MICROCAVITIES; PRESSURE SENSORS; PRESSURE TRANSDUCERS; SILICON COMPOUNDS; THICKNESS MEASUREMENT; VACUUM; VACUUM GAGES;

BIAS POWER; LOW-POWER VACUUM SENSORS; MICROCAVITY PRESSURE SENSORS; MICROWATTS; PRESSURE RESPONSE; PRESSURE SENSITIVITIES; SINGLE-WALLED NANOTUBES; SUSPENDED TUBES; THIN-FILM; VACUUM GAUGES; WIDE DYNAMIC RANGES;

CARBON NANOTUBES;

EID: 62449123164     PISSN: 1536125X     EISSN: None     Source Type: Journal    
DOI: 10.1109/TNANO.2008.2009534     Document Type: Article

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