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Volumn 73, Issue 1-4, 1998, Pages 129-137

Study of the inverted-magnetron cold emission microelectronic vacuum gauge

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC FIELDS; ELECTRONS; IONIZATION; KINETIC THEORY; MAGNETIC FIELDS; MAGNETRONS;

EID: 0032103162     PISSN: 03043991     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0304-3991(97)00146-0     Document Type: Conference Paper
Times cited : (8)

References (23)
  • 9
    • 0345003242 scopus 로고    scopus 로고
    • Proc. Int. Vacuum Microelectronics Conf.; selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993); 12 (2) (1994); 13 (2) (1995); 14 (3) (1996).
    • Proc. Int. Vacuum Microelectronics Conf.
  • 10
    • 0344572220 scopus 로고
    • selected articles published in
    • Proc. Int. Vacuum Microelectronics Conf.; selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993); 12 (2) (1994); 13 (2) (1995); 14 (3) (1996).
    • (1993) J. Vac. Sci. Technol. B , vol.11 , Issue.2
  • 11
    • 0345003240 scopus 로고
    • Proc. Int. Vacuum Microelectronics Conf.; selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993); 12 (2) (1994); 13 (2) (1995); 14 (3) (1996).
    • (1994) J. Vac. Sci. Technol. B , vol.12 , Issue.2
  • 12
    • 0345434372 scopus 로고
    • Proc. Int. Vacuum Microelectronics Conf.; selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993); 12 (2) (1994); 13 (2) (1995); 14 (3) (1996).
    • (1995) J. Vac. Sci. Technol. B , vol.13 , Issue.2
  • 13
    • 0344572219 scopus 로고    scopus 로고
    • Proc. Int. Vacuum Microelectronics Conf.; selected articles published in J. Vac. Sci. Technol. B 11 (2) (1993); 12 (2) (1994); 13 (2) (1995); 14 (3) (1996).
    • (1996) J. Vac. Sci. Technol. B , vol.14 , Issue.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.