Miniaturized vacuum gauges

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 22, Issue 2, 2004, Pages 309-320

  Wilfert, St ^a   Edelmann, Chr ^b  

^a OTTO VON GUERICKE UNIVERSITY   (Germany)

^b NONE   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITANCE; IONIZATION; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; MICROMACHINING; SENSORS;

IONIZATION GAGES; VACUUM SENSORS;

VACUUM GAGES;

EID: 1842451757     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1642649     Document Type: Article

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