Focused ion beam fabrication of two dimensional photonic crystals in silicon-on-insulator

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 2533-2537

  Balasubramanian, K ^a   Heard, P J ^a   Cryan, M J ^a  

^a UNIVERSITY OF BRISTOL   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

FINITE DIFFERENCE TIME DOMAIN MODELING; PHOTONIC CRYSTALS (PHCS); VERTICAL GUIDING REGIME;

BAND STRUCTURE; ETCHING; FINITE DIFFERENCE METHOD; ION BEAMS; OPTICAL PROPERTIES; SILICON ON INSULATOR TECHNOLOGY;

OPTICAL FIBERS;

EID: 33845238675     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2359729     Document Type: Review

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