Determination of beam affected area and degradation of cathodoluminescence in GaAs induced by focused ion beam irradiation

Journal of Applied Physics

Volumn 80, Issue 3, 1996, Pages 1922-1924

  Furuya, Kazuo ^a   Saito, Tetsuya ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0012128785     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.362941     Document Type: Article

References (16)

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