Perspectives on atmospheric-pressure plasmas for nanofabrication

Journal of Physics D: Applied Physics

Volumn 44, Issue 17, 2011, Pages

  Mariotti, Davide ^a   Sankaran, R Mohan ^b  

^a UNIVERSITY OF ULSTER   (United Kingdom)

^b Case Western Reserve University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE PLASMAS; GASPHASE; HIGH COSTS; HIGH-PRESSURE ENVIRONMENT; LOW PRESSURE PLASMA; LOW TEMPERATURE PLASMAS; MICRO-PLASMAS; MICRO-SCALES; NANO-SCALE MATERIALS; NANOFABRICATION; NONTHERMAL; NONTHERMAL PLASMA; SOLID METALS; VACUUM EQUIPMENT;

ATMOSPHERIC PRESSURE; ETHANOL; NANOPARTICLES; PLASMAS; VACUUM TECHNOLOGY;

PLASMA DIAGNOSTICS;

EID: 79954589242     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/17/174023     Document Type: Article

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