Breakdown, scaling and volt-ampere characteristics of low current micro-discharges

Journal of Physics D: Applied Physics

Volumn 41, Issue 19, 2008, Pages

  Petrovic Z Lj ^a   Skoro N ^a   Maric D ^a   Mahony, C M O ^b   Maguire, P D ^b   Radmilovic Raenovic M ^a   Malovic G ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF ULSTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE (FLUID MECHANICS);

DC DISCHARGES; LOW CURRENT; MICRO-DISCHARGES; NON-EQUILIBRIUM; PARALLEL PLATES; VOLT-AMPERE CHARACTERISTICS;

FLUID MECHANICS;

EID: 53349173871     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/19/194002     Document Type: Article

References (27)

1. Becker K H, Schoenbach K H and Eden J G 2006 J. Phys. D: Appl. Phys. 39 R55-70
2. Petrović Z Lj, Malović G, Radmilović- Radjenović M, Pua N, Marić D, Maguire P and Mahony C 2006 Proc. MIEL 2006 IEEE ED-SSC (Belgrade, 14-17 May 2006) pp 39-46
3. Kurunczi P, Lopez J, Shah H and Becker K 2001 Int. J. Mass Spectrom. 205 277-83
4. Mũoz-Serrano E, Hagelaar G, Callegari Th, Boeuf J P and Pitchford L C 2006 Plasma Phys. Control. Fusion 48 B391-7
5. Ito T and Terashima K 2002 Appl. Phys. Lett. 80 2854-6
6. Baars-Hibbe L, Sichler P, Schrader C, Lucas N, Gericke K-H and Buttgenbach S 2005 J. Phys. D: Appl. Phys. 38 510-7
7. Phelps A V and Petrović Z Lj 1999 Plasma Sources Sci. Technol. 8 R21-44
8. Marić D, Hartmann P, Malović G, Donkó Z and Petrović Z Lj 2003 J. Phys. D: Appl. Phys. 36 2639-48
9. Nikolić M, orević A, Stefanović I, Vrhovac S and Petrović Z Lj 2003 IEEE Trans. Plasma Sci PS 31 717-23
10. Marić D, Malović G and Petrović Z Lj 2007 J. Phys.: Conf. Ser. 86 012009
11. Mikoshiba S, Shinada S and Shirai S J 1985 J. Appl. Phys. 58 3720-6
12. Petrović Z Lj and Phelps A V 1997 Phys. Rev. E 56 5920
13. ivanov S, ivković J, Stefanović I, Vrhovac S and Petrović Z Lj 2000 Eur. Phys. J. Appl. Phys. 11 59-69
14. Marić D, Kutasi K, Malović G, Donko Z and Petrović Z Lj 2002 Eur. Phys. J. D 21 73-81
15. Radmilović-Radjenović M, Lee J K, Iza F and Park G Y 2005 J. Phys. D: Appl. Phys. 38 950-4
16. Radmilović-Radjenović M and Radjenović B 2007 Plasma Sources Sci. Technol. 16 337-40
17. Pejović M M, Neić N T and Pejović M M 2006 Phys. Plasmas 13 022108
18. koro N, Marić D and Petrović Z Lj 2008 IEEE Trans. Plasma Sci. 36 994
19. Francis G 1956 Encyclopedia of Physics vol 22 (Berlin: Springer)
20. Mariotti D, McLaughlin J A and Maguire P 2004 Plasma Sources Sci. Technol. 13 207-12
21. Makabe T and Petrović Z Lj 2006 Plasma Electronics: Applications in Microelectronic Device Fabrication (New York: Taylor and Francis/CRC Press)
22. Robson R E, White R D and Petrović Z Lj 2005 Rev. Mod. Phys. 77 1303-20
23. Petrović Z Lj, uvakov M, Nikitović, Dujko S, aić O, Jovanović J, Malović G and Stojanović V 2007 Plasma Sources Sci. Technol. 16 S1-12
24. Eden J G, Park S-J and Kim K-S 2006 Plasma Sources Sci. Technol. 15 S67-73
25. Stark R H and Schoenbach K H 1999 Appl. Phys. Lett. 74 3770-2
26. Boeuf J P 2003 J. Phys. D: Appl. Phys. 36 R53-79
27. Kurihara M and Makabe T 1999 IEEE Trans. Plasma Sci. 27 1372-8