Titanium nitriding by microwave atmospheric pressure plasma: Towards single crystal synthesis

Plasma Processes and Polymers

Volumn 6, Issue SUPPL. 1, 2009, Pages

  Cardoso, R P ^a   Arnoult, G ^a   Belmonte, Thierry ^a   Henrion, G ^a   Weber, Sylvian ^a  

^a INSTITUT JEAN LAMOUR   (France)

Author keywords

Diffusion; High pressure discharges; Nitrides; Synthesis

Indexed keywords

ATMOSPHERIC PRESSURE PLASMAS; BULK MATERIALS; COMMERCIAL GRADE; GRAIN ORIENTATION; HIGH PRESSURE DISCHARGE; HIGH TEMPERATURE; HIGH-PRESSURE DISCHARGES; LAYER THICKNESS; MICROWAVE RESONANT CAVITIES; PRE-TREATMENTS; TEMPERATURE RANGE; TIN LAYERS; TITANIUM SUBSTRATES; TREATMENT TIME;

ATMOSPHERIC PRESSURE; ELECTRIC DISCHARGES; NITRIDING; PLASMA APPLICATIONS; TITANIUM; TITANIUM NITRIDE;

SINGLE CRYSTALS;

EID: 77954926594     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200930704     Document Type: Conference Paper

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