Synergic effect of benzotriazole and chloride ion on Cu passivation in a phosphate electrochemical mechanical planarization electrolyte

Electrochimica Acta

Volumn 56, Issue 9, 2011, Pages 3303-3310

  Lin, Jeng Yu ^a   Chou, Shu Wei ^a  

^a TATUNG UNIVERSITY   (Taiwan)

Author keywords

Benzotriazole; Chloride ion; Electrochemical mechanical planarization; Phosphate electrolyte

Indexed keywords

AG/AGCL; ANODIC POTENTIALS; BENZOTRIAZOLES; CHLORIDE ION; CHLORIDE IONS; DOWNWARD PRESSURE; ELECTROCHEMICAL ANALYSIS; ELECTROCHEMICAL MECHANICAL PLANARIZATION; HIGH POTENTIAL; INHIBITION EFFECT; PASSIVE FILMS; PATTERNED STRUCTURE; PHOSPHATE ELECTROLYTE; PHOSPHATE ELECTROLYTES; POTENTIAL WINDOWS; SECONDARY ION MASS SPECTROMETERS; STEP HEIGHT; SYNERGIC EFFECTS;

ATOMIC FORCE MICROSCOPY; CHLORINE COMPOUNDS; ELECTROCHEMISTRY; IONS; MASS SPECTROMETRY; PASSIVATION; POLISHING;

ELECTROLYTES;

EID: 79953196419     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2011.01.025     Document Type: Article

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