Adsorption-desorption study of benzotriazole in a phosphate-based electrolyte for Cu electrochemical mechanical planarization

Electrochimica Acta

Volumn 55, Issue 7, 2010, Pages 2325-2331

  Lin, Jeng Yu ^a   West, Alan C ^b  

^a TATUNG UNIVERSITY   (Taiwan)

^b Department of Earth and Environmental Sciences   (United States)

Author keywords

Adsorption; Benzotriazole; Desorption; Electrochemical mechanical planarization; Microfluidic device

Indexed keywords

BENZOTRIAZOLE; BENZOTRIAZOLES; ELECTROCHEMICAL MECHANICAL PLANARIZATION; MICRO-FLUIDIC DEVICES; MICROFLUIDIC DEVICE;

ADSORPTION; ATOMIC FORCE MICROSCOPY; DESORPTION; ELECTROCHEMICAL CORROSION; ELECTROLYSIS; ELECTROLYTES; FLUIDIC DEVICES; MICROFLUIDICS; WINDOWS;

COPPER;

EID: 75949099050     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.electacta.2009.11.104     Document Type: Article

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