UV irradiation effect on sol-gel indium tin oxide nanopatterns replicated by room-temperature nanoimprint

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2805-2809

  Kang, Yuji ^a,b   Okada, Makoto ^a,b,c   Nakamatsu, Ken Ichiro ^a,b,c   Kanda, Kazuhiro ^a,b   Haruyama, Yuichi ^a,b   Matsui, Shinji ^a,b  

^a UNIVERSITY OF HYOGO   (Japan)

^b JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

^c JAPAN SOCIETY FOR THE PROMOTION OF SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INDIUM TIN OXIDE; ITO FILMS; LOW RESISTIVITY; NANO PATTERN; NANO-IMPRINT; ROOM TEMPERATURE; UV IRRADIATION;

ANNEALING; GELS; INDIUM; IRRADIATION; PHOTOLITHOGRAPHY; SOL-GEL PROCESS; SOL-GELS; SOLS; SPIN DYNAMICS; TIN;

NANOIMPRINT LITHOGRAPHY;

EID: 72849150779     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3243167     Document Type: Conference Paper

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