Ultrasmall structure fabrication via a facile size modification of nanoimprinted functional silsesquioxane features

ACS Nano

Volumn 5, Issue 2, 2011, Pages 923-931

  Pina Hernandez, Carlos ^c   Fu, Peng Fei ^b   Guo, L Jay ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b DOW CORNING CORPORATION   (United States)

^c NONE

Author keywords

functional pattern; nanofabrication; nanoimprinting; silsesquioxane

Indexed keywords

FABRICATED ARRAYS; FEATURE SIZES; FUNCTIONAL PATTERN; HIGH RESOLUTION; MASS LOSS; NANO-IMPRINTING; NANOFABRICATION; NANOFABRICATION TECHNIQUES; NANOPATTERNING; PATTERNED STRUCTURE; POLYMERIC LAYERS; SHAPE CONTOURS; SILSESQUIOXANES; SIZE MODIFICATION; STRUCTURE FABRICATION; STRUCTURE SIZES; ULTRA-SMALL;

FABRICATION;

POLYMERS;

EID: 79951929194     PISSN: 19360851     EISSN: 1936086X     Source Type: Journal    
DOI: 10.1021/nn102127z     Document Type: Article

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