Extensions of molecular ruler technology for nanoscale patterning

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 24, Issue 6, 2006, Pages 3200-3204

  Srinivasan, C ^a   Anderson, M E ^a   Carter, E M ^a   Hohman, J N ^a   Bharadwaja, S S N ^a   Trolier Mckinstry, S ^a   Weiss, P S ^a   Horn, M W ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COPPER; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; PHOTORESISTS; SELF ASSEMBLY;

MOLECULAR RULER TECHNOLOGY; NANOMETER-SCALE PATTERNS; PLANAR NANOJUNCTIONS;

NANOTECHNOLOGY;

EID: 33845254115     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2393252     Document Type: Article

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