Nanostructures using self-assembled multilayers as molecular rulers and etch resists

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 1985-1988

  Srinivasan, C ^a   Hohman, J N ^a   Anderson, M E ^a   Weiss, P S ^a   Horn, M W ^b  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b The Pennsylvania State University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MERCAPTOALKANOIC ACIDS; MOLECULAR RULERS; ORGANIC SIDEWALL SPACERS;

COPPER; ETCHING; LITHOGRAPHY; ORGANIC ACIDS; POSITIVE IONS; SELF ASSEMBLED MONOLAYERS;

NANOSTRUCTURES;

EID: 37149014491     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2811712     Document Type: Article

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