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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 6, 2008, Pages 2421-2425

Metal transfer assisted nanolithography on rigid and flexible substrates

(2) Kang, Myung Gyu a Guo, L Jay a

a UNIVERSITY OF MICHIGAN (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCH MASKS; FLEXIBLE PLASTIC SUBSTRATES; HIGH YIELDS; LOCALIZED SURFACE PLASMONS; LOW PRESSURES; METAL GRATINGS; METAL PARTICLES; METAL TRANSFERS; PARTICLE ARRAYS; PATTERN TRANSFERS; POLIES (DIMETHYSILOXANE); RIGID AND FLEXIBLE SUBSTRATES; RIGID SUBSTRATES; SHADOW EVAPORATIONS; SIDE-WALLS;

DIAMONDS; METALS; NANOLITHOGRAPHY;

SUBSTRATES;

EID: 57249103630 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.2993172 Document Type: Article

Times cited : (37)

References (13)

1
- 34250642011
- 0935-9648 10.1002/adma.200600882.
- L. J. Guo, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200600882 19, 495 (2007).
- (2007) Adv. Mater. (Weinheim, Ger.) , vol.19 , pp. 495
- Guo, L.J.¹

2
- 12444304861
- 0003-6951
- S. -H. Hur, D. Y. Khang, C. Kocabas, and J. A. Rogers, Appl. Phys. Lett. 85, 5730 (2004). 0003-6951
- (2004) Appl. Phys. Lett. , vol.85 , pp. 5730
- Hur, S.-H.¹ Khang, D.Y.² Kocabas, C.³ Rogers, J.A.⁴

3
- 79956054356
- 0003-6951 10.1063/1.1493226.
- Y. -L. Loo, R. L. Willett, K. W. Baldwin, and J. A. Rogers, Appl. Phys. Lett. 0003-6951 10.1063/1.1493226 81, 562 (2002).
- (2002) Appl. Phys. Lett. , vol.81 , pp. 562
- Loo, Y.-L.¹ Willett, R.L.² Baldwin, K.W.³ Rogers, J.A.⁴

4
- 37149041306
- 1071-1023 10.1116/1.2801873.
- M. -G. Kang and L. J. Guo, J. Vac. Sci. Technol. B 1071-1023 10.1116/1.2801873 25, 2637 (2007).
- (2007) J. Vac. Sci. Technol. B , vol.25 , pp. 2637
- Kang, M.-G.¹ Guo, L.J.²

5
- 0031632795
- 0084-6600 10.1146/annurev.matsci.28.1.153.
- Y. Xia and G. M. Whitesides, Annu. Rev. Mater. Sci. 0084-6600 10.1146/annurev.matsci.28.1.153 28, 153 (1998).
- (1998) Annu. Rev. Mater. Sci. , vol.28 , pp. 153
- Xia, Y.¹ Whitesides, G.M.²

6
- 0000132662
- 0743-7463 10.1021/la00017a030.
- A. Kumar, H. Biebuyck, and G. M. Whitesides, Langmuir 0743-7463 10.1021/la00017a030 10, 1498 (1994).
- (1994) Langmuir , vol.10 , pp. 1498
- Kumar, A.¹ Biebuyck, H.² Whitesides, G.M.³

7
- 33751154943
- 0897-4756 10.1021/cm00060a023.
- Y. Xia, X. -M. Zhao, E. Kim, and G. M. Whitesides, Chem. Mater. 0897-4756 10.1021/cm00060a023 7, 2332 (1995).
- (1995) Chem. Mater. , vol.7 , pp. 2332
- Xia, Y.¹ Zhao, X.-M.² Kim, E.³ Whitesides, G.M.⁴

8
- 9744275958
- 0003-6951 10.1063/1.1806275.
- T. Li, Z. Huang, Z. Suo, S. P. Lacour, and S. Wagner, Appl. Phys. Lett. 0003-6951 10.1063/1.1806275 85, 3435 (2004).
- (2004) Appl. Phys. Lett. , vol.85 , pp. 3435
- Li, T.¹ Huang, Z.² Suo, Z.³ Lacour, S.P.⁴ Wagner, S.⁵

9
- 55149110583
- 0935-9648 10.1002/adma.200702650.
- S. Ahn and L. J. Guo, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200702650 20, 2044 (2008).
- (2008) Adv. Mater. (Weinheim, Ger.) , vol.20 , pp. 2044
- Ahn, S.¹ Guo, L.J.²

10
- 34250625505
- 0935-9648 10.1002/adma.200601905.
- C. Pina-Hernandez, J. -S. Kim, L. J. Guo, and P. -F. Fu, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200601905 19, 1222 (2007).
- (2007) Adv. Mater. (Weinheim, Ger.) , vol.19 , pp. 1222
- Pina-Hernandez, C.¹ Kim, J.-S.² Guo, L.J.³ Fu, P.-F.⁴

11
- 0003774488
- (Interscience, New York).
- J. Brankrup and E. H. Immergut, Polymer Handbook (Interscience, New York, 1966).
- (1966) Polymer Handbook
- Brankrup, J.¹ Immergut, E.H.²

12
- 49549102750
- 0935-9648 10.1002/adma.200700225.
- B. D. Lucas, J. -S. Kim, C. Chin, and L. J. Guo, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200700225 20, 1129 (2008).
- (2008) Adv. Mater. (Weinheim, Ger.) , vol.20 , pp. 1129
- Lucas, B.D.¹ Kim, J.-S.² Chin, C.³ Guo, L.J.⁴

13
- 34547343721
- 0935-9648 10.1002/adma.200700134.
- M. -G. Kang and L. J. Guo, Adv. Mater. (Weinheim, Ger.) 0935-9648 10.1002/adma.200700134 19, 1391 (2007).
- (2007) Adv. Mater. (Weinheim, Ger.) , vol.19 , pp. 1391
- Kang, M.-G.¹ Guo, L.J.²

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