Electron-beam SAFIER™ process and its application for magnetic thin-film heads

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 6, 2004, Pages 3339-3343

  Yang, XiaoMin ^a   Gentile, Harold ^a   Eckert, Andrew ^a   Brankovic, Stanko R ^a  

^a SEAGATE RESEARCH   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT HOLES; CRITICAL DIMENSION (CD); LINE EDGE ROUGHNESS (LER); SHRINK ASSIST FILM FOR ENHANCED RESOLUTION (SAFIER™);

CATALYSTS; CROSSLINKING; ELECTRON BEAM LITHOGRAPHY; MAGNETIC HEADS; MIXING; SCANNING ELECTRON MICROSCOPY;

MAGNETIC THIN FILM DEVICES;

EID: 13244278367     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1815309     Document Type: Conference Paper

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