Nanogratings containing sub-10-nm wide trenches by dimension reduction from sloped polymer profile

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 27, Issue 6, 2009, Pages 2854-2857

  Trivedi, Krutarth ^a   Hu, Walter ^a  

^a The University of Texas at Dallas   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIMENSION REDUCTION; DIMENSION REDUCTION METHOD; HIGH RESOLUTION LITHOGRAPHY; LOW PROCESSING TEMPERATURE; LOW TEMPERATURES; METAL EVAPORATION; NANO-GRATINGS; NANOGRATING; POLYMER GRATINGS;

EVAPORATION; PLASMA ETCHING; PROCESSING; VAPORS;

POLYMERS;

EID: 72849138500     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3264683     Document Type: Conference Paper

References (19)

1. L. J. Guo, X. Cheng, and C. F. Chou, Nano Lett. 4, 69 (2004).
2. D. L. Brundrett, T. K. Gaylord, and E. N. Glytsis, Appl. Opt. 37, 2534 (1998).
3. E. Stern et al., Nature (London) 445, 519 (2007).
4. M. S. Kim, J. S. Kim, J. C. Cho, M. Shtein, L. J. Guo, and J. Kim, Appl. Phys. Lett. 90, 123113 (2007).
5. A. S. Crouch, D. Miller, K. J. Luebke, and W. Hu, Biomaterials 30, 1560 (2009).
6. B. D. Gates, Q. B. Xu, M. Stewart, D. Ryan, C. G. Willson, and G. M. Whitesides, Chem. Rev. (Washington, D.C.) 105, 1171 (2005).
7. Y. Chen and A. Pepin, Electrophoresis 22, 187 (2001).
8. S. Y. Chou, P. R. Krauss, and P. J. Renstrom, J. Vac. Sci. Technol. B 14, 4129 (1996).
9. Y. Zhao, E. Berenschot, M. de Boer, H. Jansen, N. Tas, J. Huskens, and M. Elwenspoek, J. Micromech. Microeng. 18, 064013 (2008).
10. Y. K. Choi, J. Zhu, J. Grunes, J. Bokor, and G. A. Somorjai, J. Phys. Chem. B 107, 3340 (2003).
11. Q. F. Xia, K. J. Morton, R. H. Austin, and S. Y. Chou, Nano Lett. 8, 3830 (2008).
12. X. M. Yan, S. Kwon, A. M. Contreras, J. Bokor, and G. A. Somorjai, Nano Lett. 5, 745 (2005).
13. S. Y. Chou and Q. F. Xia, Nat. Nanotechnol. 3, 295 (2008).
14. Y. Wang, X. G. Liang, Y. X. Liang, and S. Y. Chou, Nano Lett. 8, 1986 (2008).
15. X. Yang, H. Gentile, A. Eckert, and S. R. Brankovic, J. Vac. Sci. Technol. B 22, 3339 (2004).
16. D. L. Klein, R. Roth, A. K. L. Lim, A. P. Alivisatos, and P. L. McEuen, Nature (London) 389, 699 (1997).
17. G. Philipp, T. Weimann, P. Hinze, M. Burghard, and J. Weis, Microelectron. Eng. 46, 157 (1999).
18. A. L. Bogdanov, Proc. SPIE 3999, 1225 (2000).
19. T. A. Savas, M. L. Schattenburg, J. M. Carter, and H. I. Smith, J. Vac. Sci. Technol. B 14, 4167 (1996).