Fabrication of arrays of sub-20-nm silica walls via photolithography and solution-based molecular coating

Langmuir

Volumn 22, Issue 21, 2006, Pages 9057-9061

  Fujikawa, Shigenori ^a   Takaki, Rie ^a   Kunitake, Toyoki ^a  

^a RIKEN   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COST EFFECTIVENESS; NANOSTRUCTURED MATERIALS; PHOTOLITHOGRAPHY; POLYMERS; SILICA; SOL-GELS;

MOLECULAR COATINGS; OXYGEN PLASMAS; SILICA WALLS; SURFACE SOL-GEL PROCESSES;

NANOTECHNOLOGY;

EID: 33750372564     PISSN: 07437463     EISSN: None     Source Type: Journal    
DOI: 10.1021/la061830e     Document Type: Article

References (28)

1. International Technology Roadmap for Semiconductors (ITRS) Update, www.itrs.net/Common/2004Update/2004Update.htm (accessed Nov 2005).
2. Saitou, N. Int. J. Jpn. Soc. Prec. Eng. 1996, 30, 107.
3. Piner, R. D.; Zhu, J.; Xu, F.; Hong, S. H.; Mirkin, C. A. Science 1999, 283, 661.
4. Wounters, D.; Schubert, U. S. Angew. Chem., Int. Ed. 2004, 43, 2480.
5. Choi, Y. K.; King, T. J.; Hu, C. IEEE Trans. Electron Devices 2002, 49, 436.
6. Choi, Y. K.; King, T. J.; Hu, C. IEEE Electron Device Lett. 2002, 23, 25.
7. Choi, Y. K.; King, T. J.; Hu, C. Solid-State Electron 2002, 46, 1595.
8. Choi, Y. K.; Zhu, J.; Grunes, J.; Bokor, J.; Somorjai, G. A. J. Phys. Chem. B 2003, 107, 3340-3343.
9. Hammond, P. T.; Whitesides, G. M. Macromolecules 1995, 28, 7569-7571.
10. Clark, S. L.; Hammond, P. T. Adv. Mater. 1998, 10, 1515-1519.
11. Hammond, P. T. Adv. Mater. 2004, 16, 1271-1293.
12. Hua, F.; Cui, T.; Lvov, Y. Langmuir 2002, 18, 6712-6715.
13. Hua, F.; Shi, J.; Lvov, Y.; Cui, T. Nano Lett. 2002, 2, 1219-1222.
14. Hua, F.; Lvov, Y.; Cui, T. Thin Solid Films 2004, 449, 222-225.
15. Hatzor, A.; Weiss, P. S. Science 2001, 291, 1019-1020.
16. Anderson, M. E.; Mihok, M.; Tanaka, H.; Tan, L.-P.; Horn, M. W.; McCarty, G. S.; Weiss, P. S. Adv. Mater. 2006, 18, 1020-1022.
17. Sharpe, R. B. A.; Titulaer, B. J. F.; Peeters, E.; Burdinski, D.; Huskens, J.; Zandvliet, H. J. W.; Reinhought, D. N.; Poelseme, B. Nano Lett. 2006, 6, 1235-1239.
18. Ichinose, I.; Senzu, H.; Kunitake, T. Chem. Mater. 1997, 9 (6), 1296-1298.
19. Hashizume, M.; Kunitake, T. Langmuir 2003, 19 (24). 10172-10178.
20. Vendamme, R.; Onoue, S.; Nakao. A.; Kunitake, T. Nat. Mater. 2006, 5, 494-501.
21. Kunitake T.; Fujikawa, S. Aust. J. Chem. 2003, 56 (10), 1001-1003.
22. Fujikawa, S.; Kunitake, T. Chem. Lett 2005, 34 (10), 1414-1415.
23. Yan, X.-M.; Kwon, S.; Contreras, A. M.; Bokor, J.; Somorjai, G. A. Nano Lett. 2005, 5 (4), 745-748.
24. Kwon, S.; Yan, X.; Contreras, A. M.; Liddle, J. A.; Somorjai, G. A.; Bokor, J. Nano Lett. 2005, 5 (12), 2557-2562.
25. Ichinose, I.; Kawakami, T.; Kunitake, T. Adv. Mater. 1998, 10 (7), 535-539.
26. Ichinose, I.; Takaki, R.; Kuroiwa, K.; Kunitake, T. Langmuir 2003, 19 (9), 3883-3888.
27. Acharya, G.; Kunitake, T. Langmuir 2003, 19 (6), 2260-2266.
28. Lee, S. W.; Ichinose, I.; Kunitake, T. Langmuir 1998, 14 (10), 2857-2863.