메뉴 건너뛰기




Volumn 58, Issue 1, 2011, Pages 107-114

Interface-trap effects in inversion-type enhancement-mode InGaAs/ZrO 2 n-channel MOSFETs

Author keywords

High k dielectric; III V MOSFETs; InGaAs; interface traps; numerical simulation

Indexed keywords

HIGH-K DIELECTRIC; III-V MOSFETS; INGAAS; INTERFACE TRAPS; NUMERICAL SIMULATION;

EID: 78650873807     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2010.2086461     Document Type: Article
Times cited : (8)

References (39)
  • 1
    • 53649091591 scopus 로고    scopus 로고
    • 0.3As HEMTs for post-Si-CMOS logic applications
    • Oct.
    • 0.3As HEMTs for post-Si-CMOS logic applications," IEEE Trans. Electron Devices, vol. 55, no. 10, pp. 2546-2553, Oct. 2008.
    • (2008) IEEE Trans. Electron Devices , vol.55 , Issue.10 , pp. 2546-2553
    • Kim, D.-H.1    Del Alamo, J.2
  • 2
    • 77952389541 scopus 로고    scopus 로고
    • 0.3As invertedtype HEMTs with reduced gate leakage current for logic applications
    • 0.3As invertedtype HEMTs with reduced gate leakage current for logic applications," in IEDM Tech. Dig., 2009, pp. 483-486.
    • (2009) IEDM Tech. Dig. , pp. 483-486
    • Kim, T.-W.1    Kim, D.-H.2    Del Alamo, J.3
  • 3
    • 79951817457 scopus 로고    scopus 로고
    • Logic performance evaluation and transport physics of Schottky-gate III-V compound semiconductor quantum well field effect transistors for power supply voltages ranging from 0.5 V to 1.0 V
    • G. Deway, R. Kotlyar, R. Pillarisetty, M. Radosavljevic, T. Rakshit, H. Then, and R. Chau, "Logic performance evaluation and transport physics of Schottky-gate III-V compound semiconductor quantum well field effect transistors for power supply voltages ranging from 0.5 V to 1.0 V," in IEDM Tech. Dig., 2009, pp. 487-490.
    • (2009) IEDM Tech. Dig. , pp. 487-490
    • Deway, G.1    Kotlyar, R.2    Pillarisetty, R.3    Radosavljevic, M.4    Rakshit, T.5    Then, H.6    Chau, R.7
  • 4
    • 33750587582 scopus 로고    scopus 로고
    • Implantfree high-mobility flatband MOSFET: Principles of operation
    • Oct.
    • M. Passlack, K. Rajagopalan, J. Abrokwah, and R. Droopad, "Implantfree high-mobility flatband MOSFET: Principles of operation," IEEE Trans. Electron Devices, vol. 53, no. 10, pp. 2454-2459, Oct. 2006.
    • (2006) IEEE Trans. Electron Devices , vol.53 , Issue.10 , pp. 2454-2459
    • Passlack, M.1    Rajagopalan, K.2    Abrokwah, J.3    Droopad, R.4
  • 10
    • 77949735254 scopus 로고    scopus 로고
    • 0.3As metal-oxide-semiconductor field-effect- transistors
    • Mar.
    • H. Zhao, Y.-T. Chen, J. W. Yum, Y. Wang, F. Zhou, F. Xue, and J. C. Lee, "Effects of barrier layers on device performance of high mobility In0.7Ga0.3As metal-oxide-semiconductor field-effect-transistors," Appl. Phys. Lett., vol. 96, no. 10, p. 102 101, Mar. 2010.
    • (2010) Appl. Phys. Lett. , vol.96 , Issue.10 , pp. 102101
    • Zhao, H.1    Chen, Y.-T.2    Yum, J.W.3    Wang, Y.4    Zhou, F.5    Xue, F.6    Lee, J.C.7
  • 13
    • 50649094761 scopus 로고    scopus 로고
    • 0.47As n-channel metal-oxide-semiconductor field-effect transistor with HfAlO gate dielectric and TaN metal gate
    • Sep.
    • 0.47As n-channel metal-oxide-semiconductor field-effect transistor with HfAlO gate dielectric and TaN metal gate," IEEE Electron Device Lett., vol. 29, no. 9, pp. 977-980, Sep. 2008.
    • (2008) IEEE Electron Device Lett. , vol.29 , Issue.9 , pp. 977-980
    • Lin, J.Q.1    Lee, S.J.2    Oh, H.J.3    Lo, G.Q.4    Kwong, D.L.5    Chi, D.Z.6
  • 14
    • 64549101494 scopus 로고    scopus 로고
    • A new silane-ammonia surface passivation technology for realizing inversiontype surface-channel GaAs N-MOSFET with 160 nm gate length and high-quality metal-gate/high-k dielectric stack
    • H.-C. Chin, M. Zhu, Z.-C. Lee, X. Liu, K.-M. Tan, H. K. Lee, L. Shi, L.-J. Tang, C.-H. Tung, G.-Q. Lo, L.-S. Tan, and Y.-C. Yeo, "A new silane-ammonia surface passivation technology for realizing inversiontype surface-channel GaAs N-MOSFET with 160 nm gate length and high-quality metal-gate/high-k dielectric stack," in IEDM Tech. Dig., 2008, pp. 383-386.
    • (2008) IEDM Tech. Dig. , pp. 383-386
    • Chin, H.-C.1    Zhu, M.2    Lee, Z.-C.3    Liu, X.4    Tan, K.-M.5    Lee, H.K.6    Shi, L.7    Tang, L.-J.8    Tung, C.-H.9    Lo, G.-Q.10    Tan, L.-S.11    Yeo, Y.-C.12
  • 17
    • 77952345218 scopus 로고    scopus 로고
    • High performance deep-submicron inversion-mode InGaAs MOSFETs with maximum Gm exceeding 1.1 mS/μm: New HBr pretreatment and channel engineering
    • Y. Q. Wu, M. Xu, R. S. Wang, O. Koybasi, and P. D. Ye, "High performance deep-submicron inversion-mode InGaAs MOSFETs with maximum Gm exceeding 1.1 mS/μm: New HBr pretreatment and channel engineering," in IEDM Tech. Dig., 2009, pp. 323-326.
    • (2009) IEDM Tech. Dig. , pp. 323-326
    • Wu, Y.Q.1    Xu, M.2    Wang, R.S.3    Koybasi, O.4    Ye, P.D.5
  • 20
    • 77951620058 scopus 로고    scopus 로고
    • Thermally robust phosphorous nitride interface passivation for InGaAs self-aligned gate-first n-MOSFET integrated with high-k dielectric
    • H. J. Oh, J. Q. Lin, S. A. B. Suleiman, G. Q. Lo, D. L. Kwong, D. Z. Chi, and S. J. Lee, "Thermally robust phosphorous nitride interface passivation for InGaAs self-aligned gate-first n-MOSFET integrated with high-k dielectric," in IEDM Tech. Dig., 2009, pp. 339-342.
    • (2009) IEDM Tech. Dig. , pp. 339-342
    • Oh, H.J.1    Lin, J.Q.2    Suleiman, S.A.B.3    Lo, G.Q.4    Kwong, D.L.5    Chi, D.Z.6    Lee, S.J.7
  • 21
    • 41749110294 scopus 로고    scopus 로고
    • Theoretical study of some physical aspects of electronic transport in nMOSFETs at the 10-nm gate-length
    • Sep.
    • M. V. Fischetti, T. P. O'Regan, S. Narayanan, C. Sachs, S. Jin, J. Kim, and Y. Zhang, "Theoretical study of some physical aspects of electronic transport in nMOSFETs at the 10-nm gate-length," IEEE Trans. Electron Devices, vol. 54, no. 9, pp. 2116-2136, Sep. 2007.
    • (2007) IEEE Trans. Electron Devices , vol.54 , Issue.9 , pp. 2116-2136
    • Fischetti, M.V.1    O'Regan, T.P.2    Narayanan, S.3    Sachs, C.4    Jin, S.5    Kim, J.6    Zhang, Y.7
  • 22
    • 78649981043 scopus 로고    scopus 로고
    • Quantum capacitance in scaled down III-V FETs
    • D. Jin, D. Kim, T. Kim, and J. del Alamo, "Quantum capacitance in scaled down III-V FETs," in IEDM Tech. Dig., 2009, pp. 495-498.
    • (2009) IEDM Tech. Dig. , pp. 495-498
    • Jin, D.1    Kim, D.2    Kim, T.3    Del Alamo, J.4
  • 27
    • 44349146000 scopus 로고    scopus 로고
    • Self-aligned n-channel metal-oxide-semiconductor field effect transistor on high-indium-content In0.53Ga0.47As and InP using physical vapor deposition HfO2 and silicon interface passivation layer
    • May
    • I. Ok, H. Kim, M. Zhang, F. Zhu, S. Park, J. Yum, H. Zhao, D. Garcia, P. Majhi, N. Goel, W. Tsai, C. K. Gaspe, M. B. Santos, and J. C. Lee, "Self-aligned n-channel metal-oxide-semiconductor field effect transistor on high-indium-content In0.53Ga0.47As and InP using physical vapor deposition HfO2 and silicon interface passivation layer," Appl. Phys. Lett., vol. 92, no. 20, p. 202 903, May 2008.
    • (2008) Appl. Phys. Lett. , vol.92 , Issue.20 , pp. 202903
    • Ok, I.1    Kim, H.2    Zhang, M.3    Zhu, F.4    Park, S.5    Yum, J.6    Zhao, H.7    Garcia, D.8    Majhi, P.9    Goel, N.10    Tsai, W.11    Gaspe, C.K.12    Santos, M.B.13    Lee, J.C.14
  • 28
    • 67650100004 scopus 로고    scopus 로고
    • Performance analysis of 60-nm gate-length III-V InGaAs HEMTs: Simulations versus experiments
    • Jul.
    • N. Neophytou, T. Rakshit, and M. S. Lundstrom, "Performance analysis of 60-nm gate-length III-V InGaAs HEMTs: Simulations versus experiments," IEEE Trans. Electron Devices, vol. 56, no. 7, pp. 1377-1387, Jul. 2009.
    • (2009) IEEE Trans. Electron Devices , vol.56 , Issue.7 , pp. 1377-1387
    • Neophytou, N.1    Rakshit, T.2    Lundstrom, M.S.3
  • 29
    • 0019023053 scopus 로고
    • Status of the GaAs metal-oxidesemiconductor technology
    • Jun.
    • T. Mimura and M. Fukuta, "Status of the GaAs metal- oxidesemiconductor technology," IEEE Trans. Electron Devices, vol. ED-55, no. 6, pp. 1147-1155, Jun. 1980.
    • (1980) IEEE Trans. Electron Devices , vol.ED-55 , Issue.6 , pp. 1147-1155
    • Mimura, T.1    Fukuta, M.2
  • 32
    • 65249129755 scopus 로고    scopus 로고
    • Model of interface states at III-V oxide interfaces
    • Apr.
    • J. Robertson, "Model of interface states at III-V oxide interfaces," Appl. Phys. Lett., vol. 94, no. 15, p. 152 104, Apr. 2009.
    • (2009) Appl. Phys. Lett. , vol.94 , Issue.15 , pp. 152104
    • Robertson, J.1
  • 36
    • 78650861924 scopus 로고    scopus 로고
    • DESSIS8.0 User Manual, Synposys Inc., Mountain View, CA
    • DESSIS8.0 User Manual, Synposys Inc., Mountain View, CA, 2002.
    • (2002)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.