Photoemission from gold thin films for application in multiphotocathode arrays for electron beam lithography

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3374-3379

  Jiang, Xinrong ^a   Berglund, C N ^a   Bell, Anthony E ^a   Mackie, William A ^b  

^a OREGON HEALTH AND SCIENCE UNIVERSITY   (United States)

^b Linfield Research Institute   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000178725     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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