메뉴 건너뛰기




Volumn 146, Issue 1, 1999, Pages 357-362

Brightness measurements of a ZrO/W Schottky electron emitter in a transmission electron microscope

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; ELECTRIC POTENTIAL; ELECTRON DIFFRACTION; ELECTRON EMISSION; ELECTRON MICROSCOPES; ELECTRON OPTICS; LENSES; THERMIONIC EMISSION; TRANSMISSION ELECTRON MICROSCOPY; TUNGSTEN; ZIRCONIA;

EID: 0032625588     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(99)00025-2     Document Type: Article
Times cited : (24)

References (14)
  • 6
    • 0022083761 scopus 로고
    • A stable high-brightness electron gun with Zr/W tip for nanometer lithography: I. Emission properties in Schottky- And thermal field-emission regions
    • Samoto N., Shimizu R., Hashimoto H., Tamura N., Gamo K., Namba S. A stable high-brightness electron gun with Zr/W tip for nanometer lithography: I. Emission properties in Schottky- and thermal field-emission regions. Jap. J. Appl. Phys. 24(6):1985;766-771.
    • (1985) Jap. J. Appl. Phys. , vol.24 , Issue.6 , pp. 766-771
    • Samoto, N.1    Shimizu, R.2    Hashimoto, H.3    Tamura, N.4    Gamo, K.5    Namba, S.6
  • 7
    • 0003942415 scopus 로고    scopus 로고
    • Chap. 7, Space Charge and Statistical Coulomb Effects, CRC Press, New York
    • P. Kruit, G.H. Jansen, Handbook of Charged Particle Optics, Chap. 7, Space Charge and Statistical Coulomb Effects, CRC Press, New York, 1997.
    • (1997) Handbook of Charged Particle Optics
    • Kruit, P.1    Jansen, G.H.2
  • 8
    • 0021601718 scopus 로고
    • Theoretical considerations on electron optical brightness for thermionic, field and T-F emissions
    • Shimoyama H., Maruse S. Theoretical considerations on electron optical brightness for thermionic, field and T-F emissions. Ultramicroscopy. 15:1984;239-254.
    • (1984) Ultramicroscopy , vol.15 , pp. 239-254
    • Shimoyama, H.1    Maruse, S.2
  • 9
    • 84984124796 scopus 로고
    • General theory of electron emission from metals
    • Christov S.G. General theory of electron emission from metals. Phys. Stat. Sol. 17(11):1966;11-26.
    • (1966) Phys. Stat. Sol. , vol.17 , Issue.11 , pp. 11-26
    • Christov, S.G.1
  • 10
    • 6244264783 scopus 로고    scopus 로고
    • Recent advances in field electron microscopy of metals
    • Appendix I, Academic Press, New York
    • L.W. Swanson, A.E. Bell, Recent advances in field electron microscopy of metals, in: Advances in Electronics and Electron Physics, Vol. 32, Appendix I, Academic Press, New York, pp. 296-304.
    • In: Advances in Electronics and Electron Physics , vol.32 , pp. 296-304
    • Swanson, L.W.1    Bell, A.E.2
  • 11
    • 0029697463 scopus 로고    scopus 로고
    • Addition of different contributions to the charged particle probe size
    • Barth J.E., Kruit P. Addition of different contributions to the charged particle probe size. Optik. 101(3):1996;101-109.
    • (1996) Optik , vol.101 , Issue.3 , pp. 101-109
    • Barth, J.E.1    Kruit, P.2
  • 12
    • 0017551489 scopus 로고
    • Richtstrahlwertmessungen an einem Strahlerzeugungssystem mit Feldemissionskathode
    • Speidel R., Kurz D. Richtstrahlwertmessungen an einem Strahlerzeugungssystem mit Feldemissionskathode. Optik. 49(2):1977;173-185.
    • (1977) Optik , vol.49 , Issue.2 , pp. 173-185
    • Speidel, R.1    Kurz, D.2
  • 14
    • 0022121944 scopus 로고
    • Possibilities of brightness measurements in non-rotationally symmetrical electron beams by measuring the current density and determining the decrease of contrast in electron interferograms or micrographs
    • Hanszen K.-J., Lauer R., Ade G. Possibilities of brightness measurements in non-rotationally symmetrical electron beams by measuring the current density and determining the decrease of contrast in electron interferograms or micrographs. Optik. 71(2):1985;64-72.
    • (1985) Optik , vol.71 , Issue.2 , pp. 64-72
    • Hanszen, K.-J.1    Lauer, R.2    Ade, G.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.