Characterization and modelling of the ion-irradiation induced disorder in 6H-SiC and 3C-SiC single crystals

Journal of Physics D: Applied Physics

Volumn 43, Issue 45, 2010, Pages

  Debelle, A ^a   Thome L ^a   Dompoint, D ^b   Boulle, A ^b   Garrido, F ^a   Jagielski, J ^c,d   Chaussende, D ^e  

^a CENTRE DE CALCUL DE L INSTITUT NATIONAL DE PHYSIQUE NUCLEAIRE ET DE PHYSIQUE DES PARTICULES   (France)

^b UNIVERSITY OF LIMOGES   (France)

^c ukasiewicz Research Network Institute of Microelectronics and Photonics   (Poland)

^d SOLTAN INSTITUTE FOR NUCLEAR STUDIES   (Poland)

^e MINATEC   (France)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS NANOSTRUCTURES; CRYSTALLINE REGIONS; DAMAGE ACCUMULATION; ELASTIC ENERGY; ELASTIC STRAIN; EXPERIMENTAL DATA; FE-IONS; FLUENCES; ION IRRADIATION; LOW DOSE; MULTI-STEP; POLYTYPES; ROOM TEMPERATURE; RUTHERFORD BACK-SCATTERING SPECTROMETRY; STORED ENERGY; SYNCHROTRON X RAY DIFFRACTION;

AMORPHIZATION; DEFECTS; IRON COMPOUNDS; IRRADIATION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON CARBIDE; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS;

SINGLE CRYSTALS;

EID: 78249248090     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/43/45/455408     Document Type: Article

References (58)

1. Raynaud C 2001 J. Non-Cryst. Solids 280 1
2. Hasegawa A, Kohyama A, Jonec R H, Snead L L, Riccardi B and Fenici P 2000 J. Nucl. Mater. 283-287 128
3. Snead L L, Nozawa T, Katoh Y, Byun T S, Kondo D and Petti D A 2007 J. Nucl. Mater. 371 329
4. Brauer G, Anwand W, Nicht E M, Kuriplach J, Šob M, Wagner N, Coleman P G, Puska M J and Korhonen T 1996 Phys. Rev. B 54 2512
5. Zhang Y, Gao F, Jiang W, McCready D E and Weber W J 2004 Phys. Rev. B 70 125203
6. Crocombette J-P, Dumazer G, Hoang N Q, Gao F and Weber W J 2007 J. Appl. Phys. 101 023527
7. Snead L L and Zinkle S 1995 Microstructure of Irradiated Materials (MRS Symp. Proc. vol 373) ed I M Robertson et al (Pittsburgh, PA: Materials Research Society) p 377
8. Dannefaer S, Craigen D and Kerr D 1995 Phys. Rev. B 51 1928
9. Brauer G, Anwand W, Coleman P G, Knights A P, Plazaola F, Pacaud Y, Skorupa W, Störmer J and Willutzki P 1996 Phys. Rev. B 54 3084
10. Nipoti R, Albertazzi E, Bianconi M, Lotti R, Lulli G, Cervera M and Carnera A 1997 Appl. Phys. Lett. 70 3425
11. Wendler E, Heft A and Wesch W 1998 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 141 105
12. Snead L L, Zinkle S J, Hay J C and Osborne M C 1998 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 141 123
13. Barthe M F, Henry L, Corbel C, Blondiaux G, Saarinen K, Hautojärvi P, Hugonnard E, Di Cioccio L, Letertre F and Ghyselen B 2000 Phys. Rev. B 62 16638
14. Wendler E and Peiter G 2000 J. Appl. Phys. 87 7679
15. Jiang W and Weber W J 2001 Phys. Rev. B 64 125206
16. Zhang Y, Weber W J, Jiang W, Hallen A and Possnert G 2002 J. Appl. Phys. 91 6388
17. Rempel A A, Sprengel W, Blaurock K, Reichle K J, Major J and Schaefer H E 2002 Phys. Rev. Lett. 89 185501
18. Muto S and Tanabe T 2003 J. Appl. Phys. 93 3765
19. Zhang Y, Weber W J, Jiang W, Wang C M, Shutthanandan V and Hallen A 2004 J. Appl. Phys. 95 4012
20. Jiang W, Zhang Y and Weber W J 2004 Phys. Rev. B 70 165208
21. Kinomura A, Chayahara A, Mokuno Y, Tsubouchi N and Horino Y 2005 J. Appl. Phys. 97 103538
22. Leclerc S, Declémy A, Beaufort M F, Tromas C and Barbot J F 2005 J. Appl. Phys. 98 113506
23. Benyagoub A, Audren A, Thomé L and Garrido F 2006 Appl. Phys. Lett. 89 241914
24. Yamazaki S, Yamaya K, Imai M and Yano T 2007 J. Nucl. Mater. 367-370 692
25. Jiang W, Nachimuthu P, Weber W J and Ginzbursky L 2007 Appl. Phys. Lett. 91 091918
26. Zolnai Z, Ster A, Khanh N Q, Battistig G, Lohner T, Gyulai J, Kotai E and Posselt M 2007 J. Appl. Phys. 101 023502
27. Kerbiriou X, Costantini J-M, Sauzay M, Sorieul S, Thomé L, Jagielski J and Grob J-J 2009 J. Appl. Phys. 105 073513
28. Devanathan R and Weber W J 2000 J. Nucl. Mater. 278 258
29. Gao F and Weber W J 2000 Phys. Rev. B 63 054101
30. Gao F, Bylaska E J, Weber W J and Corrales L R 2001 Phys. Rev. B 64 245208
31. Gao F and Weber W J 2001 J. Appl. Phys. 89 4275
32. Devanathan R, Weber W J and Gao F 2001 J. Appl. Phys. 90 2303
33. Malerba L and Perlado J M 2002 Phys. Rev. B 65 045202
34. Gao F and Weber W J 2002 Phys. Rev. B 66 024106
35. Gao F and Weber W J 2004 Phys. Rev. B 69 224108
36. Lucas G and Pizzagalli L 2005 Phys. Rev. B 72 161202
37. Inui H, Mori H, Suzuki A and Fujita H 1992 Phil. Mag. B 65 1
38. Weber W J, Yu N and Wang L M 1998 J. Nucl. Mater. 253 53
39. Grigull S, Ishimaru M, Nastasi M, Zorman C A and Mehregany M 2001 Phil. Mag. Lett. 81 55
40. Katoh Y, Hashimoto N, Kondo S, Snead L L and Kohyama A 2006 J. Nucl. Mater. 351 228
41. Jiang W, Weber W J, Lian J and Kalkhoran N M 2009 J. Appl. Phys. 105 013529
42. Boulle A, Chaussende D, Latu-Romain L, Conchon F, Masson O and Guinebretière R 2006 Appl. Phys. Lett. 89 091902
43. Ziegler J F, Biersack J P and Littmark U 1985 The Stopping Range of Ions in Solids vol 1, ed J F Ziegler et al (New York: Pergamon) SRIM program can be downloaded at www.srim.org
44. Averback R S 1994 J. Nucl. Mater. 216 49
45. Serruys Y, Ruault M-O, Trocellier P, Henry S, Kaïtasov O and Trouslard Ph 2005 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 240 124
46. Ferrer J-L, Simon J-P, Bérar J-F, Caillot B, Fanchon E, Käikati O, Arnaud S, Guidotti M, Pirocchi M and Roth M 1998 J. Synchrotron Radiat. 5 1346
47. Dupeyrat C, Declémy A, Drouet M, Eyidi D, Thomé L, Debelle A, Viret M and Ott F 2009 Phys. B: Condens. Matter 404 4731
48. Nowicki L, Turos A, Ratajczak R, Stonert A and Garrido F 2005 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 240 277
49. Feldman L C et al (ed) 1982 Materials Analysis by Ion Channeling (New York: Academic)
50. Gentils A, Barthe M-F, Thomé L and Behar M 2008 Appl. Surf. Sci. 255 78
51. Boulle A, Conchon F and Guinebretière R 2009 J. Appl. Crystallogr. 42 85
52. Boulle A and Debelle A 2010 J. Appl. Crystallogr. 43 1046
53. Emoto T, Ghatak J, Satyam P V and Akimoto K 2009 J. Appl. Phys. 106 043516
54. Jagielski J and Thomé L 2009 Appl. Phys. A: Mater. Sci. Process. 97 147
55. Weber W J 2000 Nucl. Instrum. Methods Phys. Res. B: Beam Interact. Mater. Atoms 166-167 98
56. Sattonnay G, Moll S, Thomé L, Pascanut-Decorse C, Legros C, Simon P, Jagielski J, Jozwik I and Monnet I J. Appl. Phys. at press
57. Moll S, Thomé L, Sattonnay G, Debelle A, Vincent L, Garrido F and Jagielski J 2009 J. Appl. Phys. 106 073509
58. Debelle A, Moll S, Décamps B, Thomé L, Sattonnay G, Garrido F, Jozwik I and Jagielski J 2010 Scr. Mater. 63 665