Strain profiles in thin films: Influence of a coherently diffracting substrate and thickness fluctuations

Journal of Applied Crystallography

Volumn 42, Issue 1, 2009, Pages 85-92

  Boulle, A ^a   Conchon, F ^a   Guinebretiere R ^a  

^a UNIVERSITY OF LIMOGES   (France)

Author keywords

High resolution X ray diffraction; Strain profiles; Thin films

Indexed keywords

EID: 58249125590     PISSN: 00218898     EISSN: 16005767     Source Type: Journal    
DOI: 10.1107/S0021889808036406     Document Type: Article

References (42)

1. Authier, A. (2005). Dynamical Theory of X-ray Diffraction, IUCr Monographs on Crystallography 11. Oxford University Press.
2. Bartels,W. J., Hornstra, J. & Lobeek, D. J.W. (1986). Acta Cryst. A42, 539-545.
3. Boulle, A., Conchon, F. & Guinebretière, R. (2006). Acta Cryst. A62, 11-20.
4. Boulle, A., Guinebretière, R. & Dauger, A. (2004). J. Phys. IV, 118, 183-191.
5. Boulle, A., Guinebretière, R. & Dauger, A. (2006) Z. Kristallogr. Suppl. 23, 123-128.
6. Boulle, A., Guinebretière, R., Masson, O., Bachelet, R., Conchon, F. & Dauger, A. (2006). Appl. Surf. Sci. 253, 95-105.
7. Boulle, A., Masson, O., Guinebretière, R. & Dauger, A. (2003). J. Appl. Cryst. 36, 1424-1431.
8. Catalan, G., Noheda, B.,McAneney, J., Sinnamon, L. J. & Gregg, J. M. (2005). Phys. Rev. B, 72, 020102(R).
9. Conchon, F., Boulle, A., Girardot, C., Pignard, S., Guinebretière, R., Dooryhée, E., Hodeau, J. L., Weiss, F. & Kreisel, J. (2007). Mater. Sci. Eng. B, 144, 32-37.
10. Conchon, F., Boulle, A., Girardot, C., Pignard, S., Guinebretière, R., Dooryhée, E., Hodeau, J. L., Weiss, F., Kreisel, J. & Bérar, J. F. (2007). J. Phys. D Appl. Phys. 40, 4872-4876.
11. Conchon, F., Boulle, A., Guinebretiè re, R., Dooryhée, E., Hodeau, J. L., Girardot, C., Pignard, S., Kreisel, J. &Weiss, F. (2008). J. Phys. Condens. Mater. 20, 145216.
12. Conchon, F., Boulle, A., Guinebretiè re, R., Dooryhée, E., Hodeau, J. L., Girardot, C., Pignard, S., Kreisel, J., Weiss, F., Libralesso, L. & Lee, T. L. (2008). J. Appl. Phys. 103, 123501.
13. Conchon, F., Boulle, A., Guinebretière, R., Girardot, C., Pignard, S., Kreisel, J., Weiss, F., Dooryhée, E. & Hodeau, J. L. (2007). Appl. Phys. Lett. 91, 192110.
14. Diaz, B., Abramof, E., Castro, R. M., Ueda, M. & Reuther, H. (2007). J. Appl. Phys. 101, 103523.
15. Dilanian, R. A., Nikulin, A. Y., Darahanau, A. V., Hester, J. & Zaumseil, P. (2006). J. App. Phys. 99, 113526.
16. Ferrer, J.-L., Simon, J.-P., Bérar, J.-F., Caillot, B., Fanchon, E., Kaïkati, O., Arnaud, S., Guidotti, M., Pirocchi, M. & Roth, M. (1998). J. Synchrotron Rad. 5, 1346-1356.
17. Fewster, P. F. (1992). J. Appl. Cryst. 25, 714-723.
18. Halliwell, M. A. G., Lyons, M. H. & Hill, M. J. (1984). J. Cryst. Growth, 68, 523-531.
19. Hironaka, Y., Yazaki, A., Saito, F., Nakamura, K. G., Takenaka, H. & Yoshida, M. (2000). Appl. Phys. Lett. 77, 1967-1969.
20. Holý, V., Pietsch, U. & Baumbach, T. (1999). High Resolution X-ray Scattering from Thin Films and Multilayers. New York: Springer-Verlag.
21. Kiss, L. B., Soderlund, J., Niklasson, G. A. & Granqvist, C. G. (1999). Nanotechnology, 10, 25-28.
22. Klappe, J. G. E. & Fewster, P. F. (1994). J. Appl. Cryst. 27, 103-110.
23. Kyutt, R. N., Petrashen, P. V. & Sorokin, L. M. (1980). Phys. Status Solidi A, 60, 381-389.
24. Leclerc, S., Declémy, A., Beaufort, M. F., Tromas, C. & Barbot, J. F. (2005). J. Appl. Phys. 98, 113506.
25. Milita, S. & Servidori, M. (1995). J. Appl. Cryst. 28, 666-672.
26. Nicola, L., Van der Giessen, E. & Gurtin, M. E. (2005). J. Mech. Phys. Solids, 53, 1280-1294.
27. Nikulin, A. Y. (1998). Recent Res. Dev. Appl. Phys. 1, 1-21.
28. Pietsch, U., Holý, V. & Baumbach, T. (2004). High Resolution X-ray Scattering - From Thin Films to Lateral Nanostructures. New York: Springer-Verlag.
29. Press, W. H., Teukolsky, S. A., Vetterling, W. T. & Flannery, B. P. (2002). Numerical Recipes in C. Cambridge University Press. http:// www.nr.com/.
30. Provencher, W. (1982). Comput. Phys. Commun. 27, 229-242.
31. Shen, Q. & Kycia, S. (1997). Phys. Rev. B, 55, 15791-15797.
32. Siegle H., Hoffmann, A., Eckey, L., Thomsen, C., Christen, J., Bertram, F., Schmidt, D., Rudloff, D. & Hiramatsu, K. (1997). Appl. Phys. Lett. 71, 2490-2492.
33. Sousbie, N., Capello, L., Eymery, J., Rieutord, F. & Lagahe, C. (2006). J. Appl. Phys. 99, 103509.
34. Steinfort, A. J., Scholte, P. M. L. O., Ettema, A., Tuinstra, F., Nielsen, M., Landemark, E. & Smilgies, D. M. (1996). Phys. Rev. Lett. 77, 2009-2012.
35. Takagi, S. (1969). J. Phys. Soc. Jpn, 26, 1239-1253.
36. Taupin, D. (1964). Bull. Soc. Fr. Mineral. Cristallogr. 87, 469-511.
37. Vartanyants, I., Ern, C., Donner, W., Dosch, H. & Caliebe, W. (2000). Appl. Phys. Lett. 77, 3929-3931.
38. Veen, F. van der & Pfeiffer, F. (2004). J. Phys. Condens. Mater. 16, 5003-5030.
39. Wie, C. R. (1994). Mater. Sci. Eng. Rep. 13, 1-56.
40. Wierzchowski, W., Wieteska, K., Graeff, W., Turos, A. & Grötzschel, R. (2005). Vacuum, 78, 569-575.
41. Zaumseil, P., Winter, U., Cembali, F., Servidori, M. & Sourek, Z. (1987). Phys. Status Solidi A, 100, 95-104.
42. Zolotoyabko, E. (1998). J. Appl. Cryst. 31, 241-251.