Swelling of SiC under helium implantation

Journal of Applied Physics

Volumn 98, Issue 11, 2005, Pages

  Leclerc, S ^a   Declmy A ^a   Beaufort, M F ^a   Tromas, C ^a   Barbot, J F ^a  

^a UNIVERSITÉ DE POITIERS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTIC CONTRIBUTION; HELIUM BUBBLES; HELIUM IMPLANTATION; THRESHOLD CONCENTRATION;

AMORPHIZATION; ELECTRON MICROSCOPY; HELIUM; ION IMPLANTATION; STRAIN MEASUREMENT; SWELLING; X RAY DIFFRACTION;

SILICON CARBIDE;

EID: 29144524882     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2137441     Document Type: Article

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