Measurement of pull-off force on imprinted nanopatterns in an inert liquid

Nanotechnology

Volumn 21, Issue 29, 2010, Pages

  Kim, Jae Kwan ^a   Lee, Dong Eon ^a   Lee, Woo Il ^a   Suh, Kahp Y ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS POLYETHYLENES; CAVITY REGIONS; CONFINEMENT EFFECTS; EXPERIMENTAL DATA; EXPERIMENTAL OBSERVATION; FEATURE SIZES; LIFSHITZ THEORY; MODEL-BASED; MOLECULAR DYNAMIC SIMULATIONS; NANO PATTERN; NANO-CAVITIES; NANO-SCALE PATTERNS; NON-POLAR; PATTERN SIZE; PERFLUORODECALIN; PERFLUOROPOLYETHERS; POLYMER CHAINS; POLYURETHANE ACRYLATES; PULL-OFF FORCES; RESIST LAYERS; SILICON SUBSTRATES; THERMAL NANOIMPRINT LITHOGRAPHY; ULTRAVIOLET CURABLE; YOUNG'S MODULUS;

ATOMIC FORCE MICROSCOPY; ELASTIC MODULI; ELASTICITY; MOLECULAR DYNAMICS; MOLECULAR WEIGHT; NANOIMPRINT LITHOGRAPHY; POLYMERS; POLYSTYRENES;

COMPUTER SIMULATION;

EID: 77954405183     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/21/29/295306     Document Type: Article

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