Density variation of nanoscale patterns in thermal nanoimprint lithography

Applied Physics Letters

Volumn 91, Issue 25, 2007, Pages

  Woo, Young Seok ^a   Kim, Jae Kwan ^a   Lee, Dong Eon ^a   Suh, Kahp Yang ^a   Lee, Woo Il ^a  

^a Seoul National University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; MOLECULAR DYNAMICS; MOLECULAR MODELING; VAN DER WAALS FORCES;

DENSITY VARIATION; MOLECULAR DYNAMICS SIMULATIONS; NANOPATTERNS;

NANOIMPRINT LITHOGRAPHY;

AMORPHOUS MATERIALS; LITHOGRAPHY; MOLECULAR STRUCTURE; SIMULATION;

EID: 37549015966     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2827187     Document Type: Article

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