SCOPUS 정보 검색 플랫폼

Thin Solid Films

Volumn 518, Issue 1, 2009, Pages 126-129

Fabrication of polycrystalline TiO2 nanopatterns by TiO2 sol base imprint lithography

(3) Yoon, Kyung min a Yang, Ki yeon a Lee, Heon a

a Korea University (South Korea)

Author keywords

Direct patterning; Nano patterns; Nanoimprint lithography; Nanostructures; Sol gel method; Titanium oxide

Indexed keywords

DIRECT PATTERNING; IMPRINT LITHOGRAPHY; IMPRINTING PROCESS; NANO PATTERN; NANO PATTERNS; OXIDIZED SI WAFERS; PDMS MOLDS; POLYCRYSTALLINE; POLYDIMETHYLSILOXANE PDMS; SOL-GEL METHOD; SOL-GEL METHODS; TETRABUTYLORTHOTITANATE; TIO; X- RAY DIFFRACTION;

ETHANOL; GELATION; GELS; MICROCHANNELS; MOLDS; NANOSTRUCTURES; RESINS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SILICONES; SOL-GEL PROCESS; SOL-GELS; SOLS; TITANIUM; TITANIUM OXIDES; TRANSMISSION ELECTRON MICROSCOPY;

NANOIMPRINT LITHOGRAPHY;

EID: 69549133615 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2009.07.056 Document Type: Article

Times cited : (33)

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