Instrumented indentation testing for local characterisation of polymer properties after nanoimprint

Microelectronic Engineering

Volumn 78-79, Issue 1-4, 2005, Pages 618-624

  Cross, G L W ^a   O'Connell, B S ^a   Pethica, J B ^a   Schulz, H ^b   Scheer, H C ^b  

^a TRINITY COLLEGE DUBLIN   (Ireland)

^b UNIVERSITY OF WUPPERTAL   (Germany)

Author keywords

Hot embossing; Instrumented indentation; Nanoimprint; Nanoindentation; Nanomechanics; Polymer properties

Indexed keywords

ANNEALING; ASPECT RATIO; CRACK PROPAGATION; ETCHING; EXTRUSION; INDENTATION; NANOTECHNOLOGY; RESIDUAL STRESSES; STRAIN HARDENING; SURFACE ROUGHNESS;

HOT EMBOSSING; INSTRUMENTED INDENTATION; NANOINDENTATION; NANOMECHANICS; POLYMER PROPERTIES;

POLYMERS;

EID: 14944341254     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2005.01.018     Document Type: Conference Paper

References (16)

1. S.Y. Chou, P.R. Krauss, and P.J. Renstrom J. Vac. Sci. Technol. B 14 1996 4129 4133
2. K.L. Johnson Contact Mechanics 1985 Oxford Press
3. J.B. Pethica, R. Hutchings, and W.C. Oliver Phil. Mag. A 48 1983 593 606
4. J.B. Pethica, and W.C. Oliver Mater. Res. Soc. Sympos. O Proc. 130 1989 13
5. D. Tabor The Hardness of Metals 1950 Oxford Press
6. A.C. Fisher-Cripps Nanoindentation 2002 Springer
7. W.C. Oliver, and G. Pharr J. Mater. Res. 7 1992 1564 1583
8. T.A. Tervoort, and L.E. Govaert J. Rheol. 44 2000 1263 1277
9. P. Hong, and H. Lee Appl. Phys. Lett. 83 2003 2441 2443
10. X. Chen, and J.J. Vlassak Mater. Res. Soc. Sympos. Q Proc. 649 2001 Q1.3.1
11. N. Bogdanski, M. Wissen, A. Ziegler and H.-C. Scheer, Microelectronic Engineering, in press
12. H. Schulz, M. Wissen, N. Bogdanski, H.-C. Scheer, K. Mattes and Ch. Friedrich, Microelectronic Engineering, this issue
13. H.-C. Scheer, and H. Schulz Microelectron. Eng. 56 2001 311 332
14. G.L.W. Cross, B.S. O'Connell, J.B. Pethica, and W. Oliver Proc. IEEE-Nano 2003 494 497
15. G.L.W. Cross, B.S. O'Connell, J.B. Pethica, Appl. Phys. Lett., in press
16. J. Brandrup, and E.H. Immergut Polymer Handbook 1989 Wiley-Interscience