Fabrication of nanopattern by nanoimprint lithography for the application to protein chip

Biochip Journal

Volumn 3, Issue 1, 2009, Pages 76-81

  Choi, Ho Gil ^a   Choi, Dong Sik ^a   Kim, Eun Wook ^b   Jung, Gun Young ^b   Choi, Jeong Woo ^a   Oh, Byung Keun ^a  

^a Sogang University   (South Korea)

^b Gwangju Institute of Science and Technology (GIST)   (South Korea)

Author keywords

Nanoimprint lithography; Nanopore shaped pattern; Prostate specific antigen; Protein array

Indexed keywords

ANTIGENS; BIOSENSORS; FABRICATION; FIELD EMISSION; FIELD EMISSION MICROSCOPES; FLUORESCENCE MICROSCOPY; GOLD; NANOPORES; PROTEINS; SCANNING ELECTRON MICROSCOPY;

BIOELECTRONIC DEVICE; CONVENTIONAL LITHOGRAPHY; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; LOW PRESSURES; MICRO-SCALES; NANO PATTERN; NANO-SIZE; NANOSCALE STRUCTURE; PATTERNING PROCESS; PROCESS SPEED; PROSTATE SPECIFIC ANTIGEN; PROTEIN ARRAY; PROTEIN ARRAYS; PROTEIN CHIP; ROOM TEMPERATURE; SHAPED PATTERN; SUPERIOR RESOLUTION; VERSATILE METHODS;

NANOIMPRINT LITHOGRAPHY;

EID: 70449134771     PISSN: 19760280     EISSN: 20927843     Source Type: Journal    
DOI: None     Document Type: Article

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