Kinetic Monte Carlo simulations of nanocrystalline film deposition

Journal of Applied Physics

Volumn 107, Issue 7, 2010, Pages

  Ruan, Shiyun ^a   Schuh, Christopher A ^a  

^a Massachusetts Institute of Technology Cambridge   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIFFUSION KINETICS; FINER GRAINS; GRAIN NUCLEATION; GRAIN-BOUNDARY ENERGY; GROWTH DIRECTIONS; GROWTH SURFACES; HIGH DEPOSITION RATES; KINETIC MONTE CARLO SIMULATION; LOW TEMPERATURES; MICROSTRUCTURE FORMATION; NANO GRAINS; NANO-CRYSTALLINE STRUCTURES; NANO-SCALE ROUGHNESS; NANOCRYSTALLINE FILMS; PEAK SPACING; VACANCY CONTENT;

COMPUTER SIMULATION; DEPOSITION RATES; GRAIN BOUNDARIES; GRAIN SIZE AND SHAPE; MONTE CARLO METHODS; NUCLEATION; RADIATION DAMAGE; VACANCIES;

GRAIN GROWTH;

EID: 77951575625     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3331986     Document Type: Article

References (64)

1. H. Gleiter, Prog. Mater. Sci. 0079-6425 33, 223 (1989). 10.1016/0079-6425(89)90001-7
2. U. Erb, Nanostruct. Mater. 0965-9773 6, 533 (1995). 10.1016/0965-9773(95) 00114-X
3. A. J. Detor and C. A. Schuh, Acta Mater. 1359-6454 55, 371 (2007). 10.1016/j.actamat.2006.08.032 (Pubitemid 44820951)
4. U. E. G. P. Mohammadreza Baghbanan, Phys. Status Solidi A 0031-8965 203, 1259 (2006). 10.1002/pssa.200566155 (Pubitemid 43764327)
5. M. Stueber, H. Holleck, H. Leiste, K. Seemann, S. Ulrich, and C. Ziebert, J. Alloys Compd. 0925-8388 483, 321 (2009). 10.1016/j.jallcom.2008.08.133
6. J. E. Butler and A. V. Sumant, Chem. Vap. Deposition 0948-1907 14, 145 (2008). 10.1002/cvde.200700037
7. I. Gurrappa and L. Binder, Sci. Technol. Adv. Mater. 1468-6996 9, 043001 (2008). 10.1088/1468-6996/9/4/043001
8. S. C. Tjong and H. Chen, Mater. Sci. Eng. R. 0927-796X 45, 1 (2004). 10.1016/j.mser.2004.07.001
9. F. Xiao, C. Hangarter, B. Yoo, Y. Rheem, K. -H. Lee, and N. V. Myung, Electrochim. Acta 0013-4686 53, 8103 (2008). 10.1016/j.electacta.2008.06.015
10. Paritosh, D. J. Srolovitz, C. C. Battaile, X. Li, and J. E. Butler, Acta Mater. 1359-6454 47 (7), 2269 (1999). 10.1016/S1359-6454(99)00086-5
11. P. Smereka, X. Q. Li, G. Russo, and D. J. Srolovitz, Acta Mater. 1359-6454 53, 1191 (2005). 10.1016/j.actamat.2004.11.013 (Pubitemid 40114267)
12. D. D. Perovic, G. C. Weatherly, J. P. Noel, and D. C. Houghton, J. Vac. Sci. Technol. B 1071-1023 9, 2034 (1991). 10.1116/1.585772
13. D. D. Perovic, G. C. Weatherly, P. J. Simpson, P. J. Schultz, T. E. Jackman, G. C. Aers, J. P. Noel, and D. C. Houghton, Phys. Rev. B 0163-1829 43, 14257 (1991). 10.1103/PhysRevB.43.14257
14. L. Dong and D. J. Srolovitz, J. Appl. Phys. 0021-8979 84, 5261 (1998). 10.1063/1.368794
15. R. W. Smith and D. J. Srolovitz, J. Appl. Phys. 0021-8979 79, 1448 (1996). 10.1063/1.360983
16. R. W. Smith, F. Ying, and D. J. Srolovitz, Growth and Texture of Polycrystalline Thin Films (Materials Research Society, Pittsburgh, PA, 1996), pp. 39-44.
17. C. C. Battaile and D. J. Srolovitz, Annu. Rev. Mater. Sci. 0084-6600 32, 297 (2002). 10.1146/annurev.matsci.32.012102.110247 (Pubitemid 34992573)
18. M. Kotrla and P. Smilauer, Phys. Rev. B 0163-1829 53, 13777 (1996). 10.1103/PhysRevB.53.13777
19. H. Yan, Phys. Rev. Lett. 0031-9007 68, 3048 (1992). 10.1103/PhysRevLett. 68.3048
20. S. Das Sarma, C. J. Lanczycki, S. V. Ghaisas, and J. M. Kim, Phys. Rev. B 0163-1829 49, 10693 (1994). 10.1103/PhysRevB.49.10693
21. M. Schimschak and J. Krug, Phys. Rev. B 0163-1829 52, 8550 (1995). 10.1103/PhysRevB.52.8550
22. C. J. Lanczycki, V. Jejjala, and S. Das Sarma, Phys. Rev. E 1063-651X 54, 4755 (1996). 10.1103/PhysRevE.54.4755
23. J. Krug, M. Plischke, and M. Siegert, Phys. Rev. Lett. 0031-9007 70, 3271 (1993). 10.1103/PhysRevLett.70.3271
24. M. Siegert and M. Plischke, Phys. Rev. E 1063-651X 50, 917 (1994). 10.1103/PhysRevE.50.917
25. J. Krug, Adv. Phys. 0001-8732 46, 139 (1997). 10.1080/00018739700101498
26. P. Zhang, X. Zheng, S. Wu, and D. He, Comput. Mater. Sci. 0927-0256 30, 331 (2004). 10.1016/j.commatsci.2004.02.023
27. G. H. Gilmer, H. Huang, T. D. de la Rubia, J. Dalla Torre, and F. Baumann, Thin Solid Films 0040-6090 365, 189 (2000). 10.1016/S0040-6090(99) 01057-3
28. P. Bruschi, A. Nannini, and F. Pieri, Phys. Rev. B 0163-1829 63, 035406 (2001). 10.1103/PhysRevB.63.035406
29. H. Huang and L. G. Zhou, J. Comput.-Aided Mater. Des. 0928-1045 11, 59 (2004). 10.1007/s10820-004-8326-1 (Pubitemid 40496351)
30. J. E. Rubio, M. Jaraiz, I. Martin-Bragado, J. M. Hernandez-Mangas, J. Barbolla, and G. H. Gilmer, J. Appl. Phys. 0021-8979 94, 163 (2003). 10.1063/1.1577814
31. H. Huang and G. H. Gilmer, Comput. Mater. Sci. 0927-0256 23, 190 (2002). 10.1016/S0927-0256(01)00234-8 (Pubitemid 34404745)
32. D. J. Srolovitz, J. Vac. Sci. Technol. A 0734-2101 4, 2925 (1986). 10.1116/1.573662
33. D. J. Srolovitz, A. Mazor, and B. G. Bukiet, J. Vac. Sci. Technol. A 0734-2101 6, 2371 (1988). 10.1116/1.575558
34. R. W. Smith, J. Appl. Phys. 0021-8979 81, 1196 (1997). 10.1063/1.363863
35. H. C. Huang, G. H. Gilmer, and T. D. de la Rubia, J. Appl. Phys. 0021-8979 84, 3636 (1998). 10.1063/1.368539
36. S. W. Levine and P. Clancy, Model. Simul. Mater. Sci. Eng. 8, 751 (2000). 10.1088/0965-0393/8/5/308 0965-0393
37. L. Wang and P. Clancy, Surf. Sci. 0039-6028 473, 25 (2001). 10.1016/S0039-6028(00)00941-9 (Pubitemid 32196106)
38. I. V. Sobchenko, A. M. Gusak, and K. N. Tu, Diffus. Defect Data, Pt. A 1012-0386 237-240, 1281 (2005). 10.4028/www.scientific.net/DDF.237-240.1281
39. X. Tan, Y. C. Zhou, and X. J. Zheng, Surf. Sci. 0039-6028 588, 175 (2005). 10.1016/j.susc.2005.05.047
40. Y. Y. Huang, Y. C. Zhou, and Y. Pan, Physica E 41, 1673 (2009). 10.1016/j.physe.2009.06.001 1386-9477
41. W. Wang and H. A. Cerdeira, Phys. Rev. E 1063-651X 47, 3357 (1993). 10.1103/PhysRevE.47.3357
42. H. C. Kang and W. H. Weinberg, J. Chem. Phys. 0021-9606 90, 2824 (1989). 10.1063/1.455932
43. A. F. Voter, Phys. Rev. B 0163-1829 34, 6819 (1986). 10.1103/PhysRevB.34. 6819
44. D. M. Evans and H. Wilman, Acta Crystallogr. 0907-4449 5, 731 (1952). 10.1107/S0365110X52002057
45. H. P. Murbach and H. Wilman, Proc. Phys. Soc. London, Sect. B 0370-1301 66, 905 (1953). 10.1088/0370-1301/66/11/301
46. S. M. Rossnagel, R. S. Robinson, and H. R. Kaufman, Surf. Sci. 0039-6028 123, 89 (1982). 10.1016/0039-6028(82)90131-5
47. J. K. Dennis and T. E. Such, Nickel and Chromium Plating (ASM, Materials Park, Ohio, 1993).
48. J. L. Meńndez, P. Caro, and A. Cebollada, J. Cryst. Growth 0022-0248 192, 164 (1998). 10.1016/S0022-0248(98)00402-3
49. P. R. Willmott, Prog. Surf. Sci. 0079-6816 76, 163 (2004). 10.1016/j.progsurf.2004.06.001
50. A. Chowdhury, S. Mukhopadhyay, and S. Ray, J. Cryst. Growth 0022-0248 304, 352 (2007). 10.1016/j.jcrysgro.2007.02.041 (Pubitemid 46755212)
51. See supplementary material at E-JAPIAU-107-147005 for film growth process at normalized temperatures of 0.43 and 0.78.
52. P. Bai, J. F. Mcdonald, and T. M. Lu, J. Mater. Res. 0884-2914 6, 289 (1991). 10.1557/JMR.1991.0289
53. C. R. M. Grovenor, H. T. G. Hentzell, and D. A. Smith, Acta Metall. 0001-6160 32, 773 (1984). 10.1016/0001-6160(84)90150-0 (Pubitemid 14591003)
54. N. Yoshikawa and A. Kikuchi, Grain Growth in Polycrystalline Materials Ii, Pts 1 and 2, 204, 509 (1996).
55. H. Savaloni and M. A. Player, Vacuum 0042-207X 46, 167 (1995). 10.1016/0042-207X(94)E0033-U
56. T. J. Lin, T. J. O'Keefe, and W. J. James, Thin Solid Films 0040-6090 177, 271 (1989). 10.1016/0040-6090(89)90575-0 (Pubitemid 20622182)
57. M. A. El Khakani, B. Le Drogoff, and M. Chaker, J. Mater. Res. 0884-2914 14, 3241 (1999). 10.1557/JMR.1999.0438
58. R. Mitra, R. A. Hoffman, A. Madan, and J. R. Weertman, J. Mater. Res. 0884-2914 16, 1010 (2001). 10.1557/JMR.2001.0142
59. S. H. Lee and M. G. So, J. Mater. Sci. 0022-2461 35, 4789 (2000). 10.1023/A:1004868627888
60. E. Quartarone, P. Mustarelli, S. Grandi, F. Marabelli, and E. Bontempi, J. Vac. Sci. Technol. A 0734-2101 25, 485 (2007). 10.1116/1.2714958
61. J. K. Park, J. H. Kim, S. I. Park, H. M. Lee, and D. Y. Oh, Scr. Mater. 1359-6462 48, 1161 (2003). 10.1016/S1359-6462(02)00584-5
62. H. Jalili, N. F. Heinig, and K. T. Leung, J. Appl. Phys. 0021-8979 105, 034305 (2009). 10.1063/1.3073897
63. A. Albu-Yaron, A. Frank, G. Hodes, and R. Noufi, Thin Solid Films 0040-6090 227, 18 (1993). 10.1016/0040-6090(93)90181-N
64. H. D. Merchant, W. C. Liu, L. A. Giannuzzi, and J. G. Morris, Mater. Charact. 1044-5803 53, 335 (2004). 10.1016/j.matchar.2004.07.013