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Volumn 11, Issue 1, 2004, Pages 59-74

Atomistic simulator of polycrystalline thin film deposition in three dimensions

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; DIFFUSION; KINETIC ENERGY; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; POLYCRYSTALS; THIN FILMS;

EID: 17044390896     PISSN: 09281045     EISSN: None     Source Type: Journal    
DOI: 10.1007/s10820-004-8326-1     Document Type: Article
Times cited : (10)

References (22)
  • 22
    • 17044407050 scopus 로고    scopus 로고
    • ITRS 2003: http://public.itrs.net/Files/2003ITRS/Home2003.htm provides the 2003 edition of the Semiconductor Roadmap.
    • ITRS 2003


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.