Towards the application of nanocrystalline metals in MEMS

Physica Status Solidi (A) Applications and Materials Science

Volumn 203, Issue 6, 2006, Pages 1259-1264

  Baghbanan, Mohammadreza ^a   Erb, Uwe ^a   Palumbo, Gino ^b  

^a UNIVERSITY OF TORONTO   (Canada)

^b Integran Technologies Inc   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRODEPOSITED MICROSYSTEM; NANOCRYSTALLINE METALS; NANOCRYSTALLINE STRUCTURES;

ELASTIC MODULI; ELECTRODEPOSITION; HARDNESS; METAL ANALYSIS; NANOSTRUCTURED MATERIALS; POLYCRYSTALLINE MATERIALS;

MICROELECTROMECHANICAL DEVICES;

EID: 33646760640     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200566155     Document Type: Conference Paper

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