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Annual Review of Materials Science

Volumn 32, Issue , 2002, Pages 297-319

Kinetic Monte Carlo simulation of chemical vapor deposition

(2) Battaile, Corbett C a Srolovitz, David J a

a SANDIA NATIONAL LABORATORIES (United States)

Author keywords

Film; Growth; Model; Review

Indexed keywords

ADSORPTION; COMPUTER SIMULATION; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; MONTE CARLO METHODS; REACTION KINETICS;

COARSE-GRAINED MODEL;

CHEMICAL VAPOR DEPOSITION;

EID: 0036036471 PISSN: 00846600 EISSN: None Source Type: Journal
DOI: 10.1146/annurev.matsci.32.012102.110247 Document Type: Review

Times cited : (109)

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