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Journal of Materials Research

Volumn 16, Issue 4, 2001, Pages 1010-1027

Effect of process variables on the structure, residual stress, and hardness of sputtered nanocrystalline nickel films

(4) Mitra, R a Hoffman, R A b Madan, A b Weertman, J R c

a DEFENCE METALLURGICAL RESEARCH LABORATORY (India)

b NORTHWESTERN UNIVERSITY (United States)

c Northwestern University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL MICROSTRUCTURE; DEPOSITION; GRAIN GROWTH; GRAIN SIZE AND SHAPE; NANOSTRUCTURED MATERIALS; NICKEL; POROSITY; RESIDUAL STRESSES; SPUTTERING; SURFACE ROUGHNESS; THIN FILMS;

NICKEL FILMS;

METALLIC FILMS;

EID: 0035322576 PISSN: 08842914 EISSN: None Source Type: Journal
DOI: 10.1557/JMR.2001.0142 Document Type: Article

Times cited : (43)

References (67)

1
- 0031259103
- (1997) Acta Mater. , vol.45 , pp. 4019
- Sanders, P.G.¹ Eastman, J.A.² Weertman, J.R.³

2
- 0033077781
- (1999) MRS Bull. , vol.24 , Issue.2 , pp. 44
- Weertman, J.R.¹ Farkas, D.² Hemker, K.³ Kung, H.⁴ Mayo, M.⁵ Mitra, R.⁶ VanSwygenhoven, H.⁷

3
- 85008482888
- Ph.D. Dissertation, Northwestern University, Evanston, IL (December)
- (1998)
- Elliot, B.R.¹

4
- 85008437688
- edited Y.-W. Chung, D.C. Dunand, P.K. Liaw, and G.B. Olson (TMS, Warrendale, PA)
- (1999) Advanced Materials for the 21st Century: The JuliaR. Weertman Symposium , pp. 525
- Zupan, M.¹ Legros, M.² Elliott, B.R.³ Hernker, K.J.⁴

5
- 0039196486
- (1984) Phys. Lett. , vol.102 A , pp. 365
- Birringer, R.¹ Gleiter, H.² Klein, H.-P.³ Marquardt, P.⁴

6
- 0002059246
- edited by Y.-W. Chung, D.C. Dunand, P.K. Liaw, and G.B. Olson (TMS, Warrendale, PA)
- (1999) Advanced Materials for the 21st Century: The 1999 Julia R. Weertman Symposium , pp. 553
- Mitra, R.¹ Ungar, T.² Morita, T.³ Sanders, P.G.⁴ Weertman, J.R.⁵

7
- 85037874345
- edited by. J.V. Carstensen, T. Leffers, T. Lorentzen, O.B. Pedersen, B.F. Sørensen, and G. Winther (Risø National Laboratory, Roskilde, Denmark)
- (1998) Modeling of Structure and Mechanics of Materials from Microscale to Product , pp. 1
- Agnew, S.R.¹ Elliott, B.R.² Youngdahl, C.J.³ Hemker, K.J.⁴ Weertman, J.R.⁵

8
- 0026945316
- (1992) Scripta Metall. Mater. , vol.27 , pp. 1185
- Ei-Sherik, A.M.¹ Erb, U.² Palumbo, G.³ Aust, K.T.⁴

9
- 0032664371
- (1999) Nanostruct. Mater. , vol.11 , pp. 343
- Ebrahimi, F.¹ Bourne, G.R.² Kelly, M.S.³ Matthews, T.E.⁴

10
- 85024664474
- (1994) Can. Metall. Quart. , vol.34 , pp. 165
- Aust, K.T.¹

11
- 0026204066
- (1991) Acta Metall. Mater. , vol.39 , pp. 1763
- Morris, D.G.¹ Morris, M.A.²

12
- 36549097414
- (1990) J. Appl. Phys. , vol.67 , pp. 1113
- Hahn, H.¹ Averback, R.S.²

13
- 0001259372
- (1992) Nanostr. Mater. , vol.1 , pp. 107
- Chow, G.M.¹ Edelstein, A.S.²

14
- 0030735327
- (1997) Scripta Metall. , vol.36 , pp. 29
- Savader, J.B.¹ Scanlon, M.R.² Carnrnarata, R.C.³ Smith, D.T.⁴ Heyzelden, C.⁵

15
- 0033327904
- (1999) J. Mater. Res. , vol.14 , pp. 4466
- Misra, A.¹ Nastasi, M.²

16
- 0032355111
- (1998) J. Vac. Sci. Technol. A , vol.16 , pp. 3301
- Musil, J.¹ Regent, F.²

17
- 0028518942
- (1994) Scripta Metall. Mater. , vol.31 , pp. 841
- Rittner, M.N.¹ Eastman, J.A.² Weertman, J.R.³

18
- 0015396543
- (1972) Thin Solid Films , vol.12 , pp. 71
- Doljack, F.A.¹ Hoffman, R.W.²

19
- 0020934647
- (1983) Acta Metall. , vol.31 , pp. 2103
- Hentzell, H.T.G.¹ Anderson, B.² Karlsson, S.-E.³

20
- 0021422979
- (1984) Acta Metall. , vol.32 , pp. 773
- Grovenor, C.R.M.¹ Hentzell, H.T.G.² Smith, D.A.³

21
- 0016912170
- (1977) Thin Solid Films , vol.40 , pp. 345
- Dahlgren, S.D.¹ Nicholson, W.L.² Merz, M.D.³ Bollmann, W.⁴ Devlin, J.F.⁵ Wang, R.⁶

22
- 0001366591
- (1972) J. Vac. Sci. Technol. , vol.9 , pp. 528
- Mattox, D.M.¹ Kominiak, G.J.²

23
- 0016084164
- (1974) J. Vac. Sci. Tech. , vol.11 , pp. 671
- Bland, R.D.¹ Kominiak, G.J.² Mattox, D.M.³

24
- 0016961131
- (1977) Vacuum , vol.20 , pp. 353
- Bunshah, R.F.¹

25
- 0020272597
- edited by. K.N. Tu and R. Rosenberg (Academic Press, New York)
- (1982) Treatise on Materials Science and Technology, Vol. 24: Preparation and Properties of Thin Films , vol.24 , pp. 237
- Tu, K.N.¹

26
- 0009188424
- edited by L.I. Maissel and R. Glang, (McGraw Hill, New York)
- (1983) Handbook of Thin Film Technology , pp. 1
- Maissel, L.I.¹

27
- 0004315682
- Giro Press, Carton-on-Hudson, NY
- (1995) Materials Science in Microelectronics: The relationships between thin film processing and structure , pp. 157
- Machlin, E.S.¹

28
- 0025538906
- (1990) Vacuum , vol.41 , pp. 1279
- Abermann, R.¹

29
- 0024129196
- (1988) CRC Crit. Rev. Solid State Mater. Sci. , vol.14 , pp. 225
- Doerner, M.F.¹ Nix, W.D.²

30
- 0014612979
- (1969) Fiz. Met. Metalloved. , vol.28 , pp. 653
- Movchan, B.A.¹ Demshishin, A.V.²

31
- 0016083153
- (1974) J. Vac. Sci. Techol. , vol.11 , pp. 666
- Thornton, J.A.¹

32
- 0000073841
- (1909) Proc. Roy. Soc. London , vol.A82 , pp. 172
- Stoney, G.G.¹

33
- 85008478706
- Wilmington, DE (private communication)
- Gai, P.L.¹ Du Pont De Nemours, E.I.²

34
- 0003649338
- edited by H. Hoffman (Trans Tech, Uetikon-Zuerich, Switzerland)
- (1998) Trends and New Applications of Thin Films
- Schwarzer, R.A.¹

35
- 4243683206
- (1998) Mater. Sci. Forum , vol.287-288 , pp. 38

36
- 0023040644
- (1986) Appl. Phys. Lett. , vol.48 , pp. 335
- Wong, C.C.¹ Smith, H.I.² Thompson, C.V.³

37
- 0003495856
- Card No. 4-850 Inorganic Phases, JCPDS International Centre for Diffraction Data, (Swarthmore, PA)
- (1989) Powder Diffraction File

38
- 0017719586
- (1977) Ann. Rev. Mater. Sci. , vol.7 , pp. 239
- Thornton, J.A.¹

39
- 0000226719
- (1999) Appl. Phys. Lett. , vol.75 , pp. 3123
- Misra, A.¹ Nastasi, M.²

40
- 36449005343
- (1994) J. Appl. Phys. , vol.76 , pp. 4516
- Zielinski, E.M.¹ Vinci, R.P.² Bravman, J.C.³

41
- 11944275568
- (1990) Ann. Rev. Mater. Sci. , vol.20 , pp. 245
- Thompson, C.V.¹

42
- 0004291723
- John Wiley & Sons, New York
- (1968) Probabilistic Approaches to Design , pp. 47
- Haugen, E.B.¹

43
- 0001264136
- (1998) Appl. Phys. Lett. , vol.73 , pp. 891
- Misra, A.¹ Fayeulle, S.² Kung, H.³ Mitchell, T.E.⁴ Nastasi, M.⁵

44
- 84953682805
- (1986) J. Vac. Sci. Tech. A , vol.4 , pp. 3059
- Thornton, J.A.¹

45
- 0014614633
- (1969) Fiz. Metal. Metalloved. , vol.28 , pp. 645
- Fuks, M.Y.¹ Palatnik, L.S.² Koz'ma, A.A.³ Nechitaylo, A.A.⁴ Grigor'yev, O.N.⁵

46
- 23044517569
- edited by G.W. Bailey, W.G. Jerome, S. McKernan, J.F. Mansfield and R.L. Price (Springer Verlag, NY)
- (1999) Proc. Microscopy and Microanalysis , vol.5 , pp. 834
- Mitra, R.¹ Chiou, W.A.² Weertman, J.R.³ Hoffman, R.⁴

47
- 0004277028
- McGraw-Hill, New York
- (1969) Thin Film Phenomena , pp. 137
- Chopra, K.L.¹

48
- 0009111337
- (1985) Nucl. Inst. Meth. Phy. Res. , vol.87 , Issue.8 , pp. 97
- Wang, P.¹ Thompson, D.A.² Smeltzer, W.W.³

49
- 0022078108
- (1986) Nucl. Inst. Meth. Phy. Res. , vol.B16 , pp. 288
- Wang, P.¹ Thompson, D.A.² Smeltzer, W.W.³

50
- 36549091747
- (1988) J. Appl. Phys. , vol.62 , pp. 2337
- Atwater, H.A.¹ Thompson, C.V.² Smith, H.I.³

51
- 0009111923
- Processing and Characterization of Materials Using Ion Beams, edited by L.E. Rehn, J. Greene, and F.A. Smidt (Pittsburgh, PA)
- (1989) Mater. Res. Soc. Symp. Proc. , vol.128 , pp. 297-302
- Liu, J.C.¹ Li, J.² Mayerin, J.W.³

52
- 0016911812
- (1977) Thin Solid Films , vol.40 , pp. 335
- Thornton, J.A.¹

53
- 0001471237
- (1967) J. Appl. Phys. , vol.38 , pp. 3928
- Winters, H.F.¹ Kay, E.²

54
- 0018441618
- (1979) J. Vac. Sci. Tech. , vol.16 , pp. 789
- Garrison, B.J.¹ Winograd, N.²

55
- 0004143957
- Philips Technical Laboratory Monographs in Practical Electron Microscopy in Materials Science [(N.V. Philips') Gloeilampenfabrieken, Eindhoven, The Netherlands]
- (1977) Electron Microscope Specimen Preparation Techniques in Materials Science , vol.5 , pp. 13
- Thompson-Russell, K.C.¹ Edington, J.W.²

56
- 0003761905
- Plenum Press, New York, Chap. 4
- (1986) Physics of Thin Films , pp. 96
- Eckertova, L.¹

57
- 0003482692
- Chapman & Hall, London, United Kingdom, Chap. 3
- (1991) Phase Transformations in Metals and Alloys , pp. 110
- Porter, D.A.¹ Easterling, K.E.²

58
- 0001097046
- (1950) Advan. Catalysis , vol.2 , pp. 151
- Beeck, O.¹

59
- 0002826239
- (1960) Proc. Roy. Soc. London , vol.A256 , pp. 81
- Brennan, D.¹ Hayward, D.O.² Trapnell, B.M.W.³

60
- 85008436551
- Ph.D. Dissertation, Northwestern University, Evanston, IL
- (1996)
- Sanders, P.G.¹

61
- 0001132577
- (1996) J. Appl. Phys. , vol.80 , pp. 6243
- Shull, A.L.¹ Spaepen, F.²

62
- 0032660979
- (1999) J. Mater. Res. , vol.14 , pp. 3467
- Nix, W.D.¹ Clemens, B.M.²

63
- 0001536019
- (1976) Thin Solid Films , vol.34 , pp. 185
- Hoffman, R.W.¹

64
- 0004146302
- Macmillan Series in Materials Science (Collier-Macmillan, Toronto, Canada), Chap. 6
- (1964) Elementary Dislocation Theory , pp. 168
- Weertman, J.¹ Weertman, J.R.²

65
- 0001799448
- edited by D. Peckner (Reinhold Press, New York)
- (1964) The Strengthening of Metals , pp. 93
- Fleischer, R.L.¹

66
- 0003687445
- John Wiley & Sons, New York, Chap. 1
- (1989) Deformation and Fracture Mechanics of Engineering Materials , pp. 3
- Hertzberg, R.W.¹

67
- 0001337934
- (1968) J. Electrochem Soc. , vol.115 , pp. 823
- Klokholm, E.¹ Berry, B.S.²

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