3D Monte-Carlo model of deposition and grain growth in thin films

Defect and Diffusion Forum

Volumn 237-240, Issue PART 2, 2005, Pages 1281-1286

  Sobchenko, I V ^a   Gusak, A M ^a   Tu, K N ^b  

^a CHERKASY NATIONAL UNIVERSITY   (Ukraine)

^b UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Diffusion; Flux Driven Grain Growth; Monte Carlo Modeling; Nucleaticn; Thin Film Deposition

Indexed keywords

DIFFUSION; MATHEMATICAL MODELS; MONTE CARLO METHODS; NUCLEATION; REACTION KINETICS; SUBSTRATES; THIN FILMS;

FLUX-DRIVEN GRAIN GROWTH; MONTE-CARLO MODELING; THIN FILM DEPOSITION;

GROWTH (MATERIALS);

EID: 30744467697     PISSN: 10120386     EISSN: 16629507     Source Type: Journal    
DOI: 10.4028/www.scientific.net/ddf.237-240.1281     Document Type: Conference Paper

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