Lattice Monte Carlo models of thin film deposition

Thin Solid Films

Volumn 365, Issue 2, 2000, Pages 189-200

  Gilmer, George H ^a   Huang, Hanchen ^b   De La Rubia, Tomas Diaz ^b   Torre, Jacques Dalla ^a   Baumann, Frieder ^a  

^a LUCENT TECHNOLOGIES   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; CRYSTAL GROWTH; CRYSTAL LATTICES; MOLECULAR DYNAMICS; MONTE CARLO METHODS; THIN FILMS;

LATTICE MONTE CARLO MODELS;

SEMICONDUCTING FILMS;

EID: 0033732880     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(99)01057-3     Document Type: Article

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