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Volumn 53, Issue 5, 2004, Pages 335-360

Grain structure of thin electrodeposited and rolled copper foils

Author keywords

Copper; Crystallographic texture; Deposit; Electrodeposition; Foil; Grain structure; Rolling; Sheet

Indexed keywords

ANISOTROPY; COPPER; CRYSTAL MICROSTRUCTURE; CRYSTAL ORIENTATION; ELECTRODEPOSITION; ELECTROLYTES; RANDOM PROCESSES; ROLLING; TEXTURES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

EID: 10844250342     PISSN: 10445803     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.matchar.2004.07.013     Document Type: Article
Times cited : (45)

References (33)
  • 1
    • 0038861428 scopus 로고
    • Defect structure of electrodeposits
    • Merchant HD, editor. Warrendale (PA): The Minerals, Metals and Materials Society
    • Merchant HD. Defect structure of electrodeposits. In: Merchant HD, editor. Defect structure, morphology and properties of deposits. Warrendale (PA): The Minerals, Metals and Materials Society; 1995. p. 1-59.
    • (1995) Defect Structure, Morphology and Properties of Deposits , pp. 1-59
    • Merchant, H.D.1
  • 2
    • 0038861428 scopus 로고
    • Surface morphology of electrodeposits
    • Merchant HD, editor. Warrendale (PA): The Minerals, Metals and Materials Society
    • Bergstresser TR, Merchant HD. Surface morphology of electrodeposits. In: Merchant HD, editor. Defect structure, morphology and properties of deposits. Warrendale (PA): The Minerals, Metals and Materials Society; 1995. p. 115-67.
    • (1995) Defect Structure, Morphology and Properties of Deposits , pp. 115-167
    • Bergstresser, T.R.1    Merchant, H.D.2
  • 3
    • 0030705671 scopus 로고    scopus 로고
    • Defect structure and crystallographic texture of polycrystalline electrodeposits
    • Andricacos PC, Corocoran SG, Delplancke JL, Moffat TP, Searson PC, editors. Electrochemical synthesis and modification of materials Pittsburgh (PA): Materials Research Society
    • Merchant HD, Girin OB. Defect structure and crystallographic texture of polycrystalline electrodeposits. In: Andricacos PC, Corocoran SG, Delplancke JL, Moffat TP, Searson PC, editors. MRS proceedings volume 451. Electrochemical synthesis and modification of materials. Pittsburgh (PA): Materials Research Society; 1997. p. 433-44.
    • (1997) MRS Proceedings Volume 451 , vol.451 , pp. 433-444
    • Merchant, H.D.1    Girin, O.B.2
  • 4
    • 0008386594 scopus 로고    scopus 로고
    • Electrodeposited nanostructured films and coatings: Synthesis, structure, properties and applications
    • Chow GM, Ovidko IA, Tsakalakos T, editors. Netherlands: Kluwer Academic Publishers
    • Erb U, Palumbo G, Aust KT. Electrodeposited nanostructured films and coatings: synthesis, structure, properties and applications. In: Chow GM, Ovidko IA, Tsakalakos T, editors. Nanostructured films and coatings. Netherlands: Kluwer Academic Publishers; 2000. p. 11-24.
    • (2000) Nanostructured Films and Coatings , pp. 11-24
    • Erb, U.1    Palumbo, G.2    Aust, K.T.3
  • 5
    • 0029409159 scopus 로고
    • Synthesis of bulk nanocrystalline nickel by pulsed electrodeposition
    • El-Sherik AM, Erb U. Synthesis of bulk nanocrystalline nickel by pulsed electrodeposition. J Mater Sci 1995;30:5743-8.
    • (1995) J Mater Sci , vol.30 , pp. 5743-5748
    • El-Sherik, A.M.1    Erb, U.2
  • 7
    • 0029378666 scopus 로고
    • Observations of inclusions of polymeric additives in copper electrodeposits by transmission electron microscopy
    • Hope GA, Brown GM, Schweinsberg DP, Shimizu K, Kobayashi K. Observations of inclusions of polymeric additives in copper electrodeposits by transmission electron microscopy. J Appl Electrochem 1995;25:890-4.
    • (1995) J Appl Electrochem , vol.25 , pp. 890-894
    • Hope, G.A.1    Brown, G.M.2    Schweinsberg, D.P.3    Shimizu, K.4    Kobayashi, K.5
  • 8
    • 0005952171 scopus 로고
    • The microstructure and morphology of thin films
    • Sheppard KG, Nakahara S. The microstructure and morphology of thin films. Process Adv Mater 1991;l:27-39.
    • (1991) Process Adv Mater , vol.50 , pp. 27-39
    • Sheppard, K.G.1    Nakahara, S.2
  • 9
    • 0031621667 scopus 로고    scopus 로고
    • Microstructure and mechanical properties of electroplated Cu films for damascene ULSI metallization
    • Thin films - stresses and mechanical properties VII Pittsburgh (PA): Materials Research Society
    • Dubin VM, Morales G, Ryu C, Wong SS. Microstructure and mechanical properties of electroplated Cu films for damascene ULSI metallization. MRS proceedings volume 505. Thin films - stresses and mechanical properties VII. Pittsburgh (PA): Materials Research Society; 1998. p. 137-42.
    • (1998) MRS Proceedings Volume 505 , vol.505 , pp. 137-142
    • Dubin, V.M.1    Morales, G.2    Ryu, C.3    Wong, S.S.4
  • 10
    • 0033279577 scopus 로고    scopus 로고
    • Characterization of plated Cu thin film microstructures
    • Advanced interconnects and contacts Pittsburgh (PA): Materials Research Society
    • Gignac LM, Rodbell KP, Cabral C, Andricacos PC, Rice PM, Beyers RB, et al. Characterization of plated Cu thin film microstructures. MRS proceedings volume 564. Advanced interconnects and contacts. Pittsburgh (PA): Materials Research Society; 1999. p. 373-8.
    • (1999) MRS Proceedings Volume 564 , vol.564 , pp. 373-378
    • Gignac, L.M.1    Rodbell, K.P.2    Cabral, C.3    Andricacos, P.C.4    Rice, P.M.5    Beyers, R.B.6
  • 11
    • 85008441521 scopus 로고    scopus 로고
    • Non-correlated behavior of sheet resistance and stress during self-annealing of electroplated copper
    • Piscataway (NJ): Institute of Electrical and Electronics Engineers
    • Brongersma SH, et al. Non-correlated behavior of sheet resistance and stress during self-annealing of electroplated copper. Proceedings of IEEE International Interconnect Conference. Piscataway (NJ): Institute of Electrical and Electronics Engineers; 1999. p. 290-2.
    • (1999) Proceedings of IEEE International Interconnect Conference , pp. 290-292
    • Brongersma, S.H.1
  • 14
    • 0005217779 scopus 로고    scopus 로고
    • Metallurgy and performance of electrodeposited copper for flexible circuits
    • Merchant HD, Wang JT, Giannuzzi LA, Liu YL. Metallurgy and performance of electrodeposited copper for flexible circuits. Circuit World 2000;26(4):7-14.
    • (2000) Circuit World , vol.26 , Issue.4 , pp. 7-14
    • Merchant, H.D.1    Wang, J.T.2    Giannuzzi, L.A.3    Liu, Y.L.4
  • 15
    • 10844258680 scopus 로고    scopus 로고
    • Northbrook (IL): Institute for Electronic Printed Circuits; May. IPC-4562
    • Metal foil for printed wiring applications. Northbrook (IL): Institute for Electronic Printed Circuits; 2000 (May), p. 1-21. IPC-4562.
    • (2000) Metal Foil for Printed Wiring Applications , pp. 1-21
  • 16
    • 0027607227 scopus 로고
    • Annealing kinetics and embrittlement of electrodeposited copper
    • Merchant HD. Annealing kinetics and embrittlement of electrodeposited copper. J Electron Mater 1993;22:631-8.
    • (1993) J Electron Mater , vol.22 , pp. 631-638
    • Merchant, H.D.1
  • 17
    • 51249166009 scopus 로고
    • Thermal response of electrodeposited copper
    • Merchant HD. Thermal response of electrodeposited copper. J Electron Mater 1995;24:919-25.
    • (1995) J Electron Mater , vol.24 , pp. 919-925
    • Merchant, H.D.1
  • 19
    • 51249166830 scopus 로고
    • Through-thickness characterization of copper electrodeposit
    • DeAngelis RJ, Knorr DB, Merchant HD. Through-thickness characterization of copper electrodeposit. J Electron Mater 1995;24:927-33.
    • (1995) J Electron Mater , vol.24 , pp. 927-933
    • DeAngelis, R.J.1    Knorr, D.B.2    Merchant, H.D.3
  • 20
    • 0007636144 scopus 로고    scopus 로고
    • Application of the focused ion beam in materials characterization and failure analysis
    • Young RJ. Application of the focused ion beam in materials characterization and failure analysis. Microstruct Sci 1997; 25:491-6.
    • (1997) Microstruct Sci , vol.25 , pp. 491-496
    • Young, R.J.1
  • 22
    • 0031335126 scopus 로고    scopus 로고
    • Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation
    • Workshop on specimen preparation for TEM of materials IV Pittsburgh (PA): Materials Research Society
    • Giannuzzi LA, Drown JL, Brown SR, Irwin RB, Stevie FA. Focused ion beam milling and micromanipulation lift-out for site specific cross-section TEM specimen preparation. MRS proceedings volume 480. Workshop on specimen preparation for TEM of materials IV. Pittsburgh (PA): Materials Research Society; 1997. p. 19-27.
    • (1997) MRS Proceedings Volume 480 , vol.480 , pp. 19-27
    • Giannuzzi, L.A.1    Drown, J.L.2    Brown, S.R.3    Irwin, R.B.4    Stevie, F.A.5
  • 23
    • 10844277001 scopus 로고
    • Method for the preparation of cross-section foils for the investigation of electrodeposited nickel systems by transmission electron microscopy
    • Atanassov N, Bozhkov C, Rashkov SA. Method for the preparation of cross-section foils for the investigation of electrodeposited nickel systems by transmission electron microscopy. J Microsc Spectrosc Electron 1988;13:111-8.
    • (1988) J Microsc Spectrosc Electron , vol.13 , pp. 111-118
    • Atanassov, N.1    Bozhkov, C.2    Rashkov, S.A.3
  • 24
    • 0039877760 scopus 로고
    • Growth mechanisms and structure of electrolytic deposits
    • Froment M, Maurin G. Growth mechanisms and structure of electrolytic deposits. J Microsc Spectrosc Electron 1987; 12:379-90.
    • (1987) J Microsc Spectrosc Electron , vol.12 , pp. 379-390
    • Froment, M.1    Maurin, G.2
  • 26
    • 0009143555 scopus 로고    scopus 로고
    • The representations of orientations and textures
    • Kocks UF, Tome CN, Wenk HR, editors. New York (NY): Cambridge University Press
    • Kocks UF. The representations of orientations and textures. In: Kocks UF, Tome CN, Wenk HR, editors. Texture and anisotropy. New York (NY): Cambridge University Press; 1998. p. 45-101.
    • (1998) Texture and Anisotropy , pp. 45-101
    • Kocks, U.F.1
  • 27
    • 0024071178 scopus 로고
    • On the texture of electroless copper films
    • Junginger R, Elsner G. On the texture of electroless copper films. J Electrochem Soc 1988;135:2304-8.
    • (1988) J Electrochem Soc , vol.135 , pp. 2304-2308
    • Junginger, R.1    Elsner, G.2
  • 28
    • 10844276168 scopus 로고    scopus 로고
    • Effects of gelatine and chloride ion on copper electrodeposition II
    • Koura N, Watanabe K, Yamagishi T. Effects of gelatine and chloride ion on copper electrodeposition II. Hyomen Gijutsu 2000;51:938-44.
    • (2000) Hyomen Gijutsu , vol.51 , pp. 938-944
    • Koura, N.1    Watanabe, K.2    Yamagishi, T.3
  • 29
    • 3743091894 scopus 로고
    • X-ray analysis of textures in galvanic copper coatings deposited at different temperatures
    • Handreg I, Klimanek P, Baumgartner M, Raub CJ. X-ray analysis of textures in galvanic copper coatings deposited at different temperatures. Mat Sci Forum 1993;133-136:885-90.
    • (1993) Mat Sci Forum , vol.133-136 , pp. 885-890
    • Handreg, I.1    Klimanek, P.2    Baumgartner, M.3    Raub, C.J.4
  • 30
    • 0842324456 scopus 로고    scopus 로고
    • X-ray diffraction analysis of microstructure formation in electrodeposits
    • Morawiec D, Stroz D, editors. Applied crystallography, Wisla, Poland. River Edge (NJ): World Scientific
    • Handreg I, Klimanek P, Lange G. X-ray diffraction analysis of microstructure formation in electrodeposits. In: Morawiec D, Stroz D, editors. Applied crystallography, Proc. 17th Conf., Wisla, Poland. River Edge (NJ): World Scientific; 1998. p. 402-7.
    • (1998) Proc. 17th Conf. , pp. 402-407
    • Handreg, I.1    Klimanek, P.2    Lange, G.3
  • 31
    • 0040154409 scopus 로고    scopus 로고
    • Texture and related phenomena of electrodeposits
    • Lee DM. Texture and related phenomena of electrodeposits. J Korean Inst Surf Eng 1999;32:317-30.
    • (1999) J Korean Inst Surf Eng , vol.32 , pp. 317-330
    • Lee, D.M.1
  • 33
    • 0030412580 scopus 로고    scopus 로고
    • On the thickness-dependence of textures in electrodeposited coppercoatings
    • Handreg I, Klimanek P, Lange G, Schneider M. On the thickness-dependence of textures in electrodeposited coppercoatings. Mat Sci Forum 1996;228-231:463-68.
    • (1996) Mat Sci Forum , vol.228-231 , pp. 463-468
    • Handreg, I.1    Klimanek, P.2    Lange, G.3    Schneider, M.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.